Product Details

vacuum tube furnace / furnace chemical vapor deposition FCVD tube furnace

Brief introduction of the 1200c CVD system:

The 1700℃ high temperature CVD vacuum tube furnace with built-in MFC gas mixing system is widely employed to treat CVD samples in various kinds of gases and be used in vacuum processing for metal and ceramic materials at the high temperature up to 1200℃

Specification of the vacuum tube furnace CVD system:

1	Model	CYKY-1200-CVD
2	Display	LED display
3	Limiting Temperature	1200℃
4	Usable Range	≤1100℃
5	Heating Rate	0~20℃/min
6	Temperature Zone	Single
7	Accuracy	±1℃
8	Tube Size	Φ60 × 1000 mm (Φ2.36 x 40 inch)
9	Heat Length	440 mm
10	Constant Zone	120 mm
11	Flange	for Φ60 mm tube
12	Gas channels	3
13	Gas gauge	MFC
14	Heating Element	resistance wire
15	Thermocouple	B Type
16	Max. Power	4.0 KW
17	Working Voltage	AC 208V-240V single phase, 50/60 Hz
16	Temperature Control	PID automatic control via SCR power control
17	Heating curves	30 segments programmable
18	Chamber Materials	Alumina fiber (Al2O3)
19	Dimensions	700 × 600 × 1105 mm (27.6 x 23.6 x 43.5 inch)
20	Warranty	One year limited warranty
21	Compliance	CE Certified

Standard packing list of the CVD system

No	Item	Qty	Unit
1	Operation manual	1	booklet
2	quartz tube	1	pc
3	Vacuum flanges	1	pc
4	Silicon O-ring	6	pcs
5	Al2O3 tube block	2	pcs
6	quartz crucible	2	pcs
7	Sample hook	1	pc
8	Thermocouples	1	pc
9	wrench	1	pc
10	Protecting gloves	1	pair
11	Screw driver	1	pc

Detailed photos of the CVD tube furnace system:

Photos of the gas control system

two zone tube furnace