Product Details

1600C Three Zones Tube Furnace with High Vacuum Station + 3 Channel MFC Gas Station for CVD system

Product Description

The CVD-1600X-III-HVC series furnace workstation consists of a 1600X-III series three-zone tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts.

The max. working temperature of this workstation is 1600C. The ultimate vacuum rate goes to 10^-5 torr (with our sealing assembly provided). The mass flow gas control station mixes several kinds of gas together and input

the mixed gas into a alumina tube inside the furnace. It is competent for the experiments as CVD, Diffusion and

other thermo-treatments under vacuum status and shielding gas protect.

The perameter specification of the CVD system with three zone tube furnace / CVD System

1600X-III series tube furnace	Casing	Double layer steel casing with air cooling.Built in thermostat to control Cooling running automatically when case > 55C.
	Processing Tube	Material: 99.8 high purity alumina
	Thermal Block Placement	2 pieces
	Power	7KW
	Rated Voltage	AC 208-240V Single phase, 50/60Hz
	Heating Element	MoSi2 Heating element
	Working Temp.	Max. Heating Temp.: 1200CContinuous Working Temp.: 1500C
	Heat-up Rate	Heat-up rate: 1~15C/min programmable
	Heating Zone Length	Total heating zone:600mm (220mm + 200mm + 200mm) This is customized.
	Temp. Controller	Three precision temperature controllers to control three zones separately. PID automatic control with 30 steps programmable segments. Temperature accuracy: 1C Thermocouple:B type built inside the furnace
	Vacuum Seal	One pair of stainless steel vacuum flange with:- one mechanical pressure gauge- two needle valves - one KF-40 connector for the high vacuum station.
	Rated Voltage	AC 208-240V Single Phase, 50/60Hz
	Dimension	1100(L) x 450(W) x 670(H), mm
High Vacuum Station	Structure	Mobile cart size: 600 (L) x 600 (W) x 700(H), mm Max. Loading: 600 Lbs on top Molecular pump control Panel : LCD digital display
	Working Range	From 1000 mbar to <1E-7 mbar
	Ultimate Pressure	<1E-8 mbar (without any leaking )
	Voltage & Power	110VAC or 220VAC, 110W
Mass Flow Gas Control	Structure	3 channel MFC Made of 316 stainless steel with gas flow range as below: Controller : 0~500SCCM 3 Channel gas go through a Gas mixing tank: Dia 80X120mm Dimension: 600(L) x 600(W) x 700(H), mm
	Power	18W
	Rated Voltage	AC 208-240V, Single phase, 50/60Hz