Product Details

tube furnace used mass flow controller ( MFC ) / cvd tube furnace

The gas control system is designed for the control of 1-4 types of gases flowing through vacuum-sealed tube furnaces at a low cost. The gas control system is installed in a heavy duty mobile

cart where the tube furnace can be placed on the top. The front panel in the system has adjust valves

and displays for the flow rate of gases. By combining with tube furnaces, it can be used as CVD system

and annealing furnace to study the gas environmental influence has on materials.

Specification of the gas control system MFC (mass flow controller ):

Function	Two Channels	Three Channels	Four Channels
Mass Flow Controller	Voltage: 185~245V 50/60Hz Max. Output Power: 18W Working Temperature: 5~45 ºC Max. Pressure: 3x106 Pa Accuracy: ±1% FS Controlling Range: Controller : 1~500 SCCM	Voltage: 185~245V 50/60Hz Max. Output Power: 18W Working Temperature: 5~45 ºC Max. Pressure: 3x106 Pa Accuracy: ±1% FS Controlling Range: Controller : 0~500 SCCM	Voltage: 185~245V 50/60Hz Max. Output Power: 18W Working Temperature: 5~45 ºC Max. Pressure: 3x106 Pa Accuracy: ±1% FS Controlling Range: Controller : 0~500sccm
Removabiligy	4 heavy duty wheels included Max load: 500 Lbs
Mechanical Pressure Gauge	Measurement Range: -0.1~0.15 MPa (0.01 MPa/grid)
Needle Valve	316 Stainless Steel
Pipe fitting	Pipe fitting: 1/4" stainless steel 12'' length 1/4" ID Nylon pipe for immediate use
Gas mixing tank	Φ80X120mm
Stop valve	316 stainless steel needle valve, Φ1/4”
Dimension	600x600x650 mm
Compliance	CE certified
Warranty	One year limited with lifetime support