Optical 3D Profilometer Measuring Machine Instrument Profile And Roughness Tester Contour In China Surface Measurement
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High precision Nanometer Level 3D Surface Measurement Instrument Made In China
High accuracy Cnc Parts Profilometer And Roughness Contour Measuring Machine
Metrology Institute Use Thread Measuring Profilometer Stylus Made In China for roughness measurement
High Accuracy Made In China Laser Interferometer For Precision Length Measuring
CNC supported High Accuracy Single Frequency Interference Linear Guide Testing Laser
Light Source
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White/Green LED
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Image System
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1024*1024(Optional 2048×2048)
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Objectives
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10×,50× ,(Optional 2.5×,5×,20×,100×)
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Optical zoom
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1×(Optional 0.5×,0.75×)
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Lens holder
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3 holes(Optional 5 holes)
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XY Stage
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Size
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320*200mm
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Moving range
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140*100mm
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Loading capacity
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10kg
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Control Type
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Motorized
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Resolution
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0.1μm
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Tilt
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±5°(Manual)
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Z Stage
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Moving range
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100mm( Motorized)
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Scanning range
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10mm
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Scanning speed
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45μm/s
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Resolution
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0.1nm
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Reflectivity of testing object
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0.05%~100%
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Step Height measurement
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Accuracy
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0.7%
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Repeatability
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0.1% 1σ
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Zoom ratio of lens
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2.5×
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5×
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10×
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20×
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50×
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100×
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Numerical hole diameter
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0.075
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0.13
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0.3
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0.4
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0.55
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0.7
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Optical resolution @550nm(µm)
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3.7
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2.1
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0.92
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0.69
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0.5
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0.4
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Depth of focus(µm)
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48.6
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16.2
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3.04
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1.71
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0.9
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0.56
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Working distance(mm)
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10.3
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9.3
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7.4
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4.7
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3.4
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2
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Field H×V (mm)
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Video system
1024×1024 |
0.5×
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3.84×3.84
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1.92×1.92
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0.96×0.96
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0.48×0.48
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0.192×0.192
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0.096×0.096
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0.75×
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2.56×2.56
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1.28×1.28
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0.64×0.64
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0.32×0.32
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0.128×0.128
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0.064×0.064
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1×
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1.92×1.92
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0.96×0.96
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0.48×0.48
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0.24×0.24
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0.096×0.096
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0.048×0.048
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Video system
2048×2048 |
0.5×
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8.96×8.96
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4.48×4.48
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2.24×2.24
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1.12×1.12
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0.448×0.448
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0.224×0.224
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0.75×
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6.44×6.44
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3.22×3.22
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1.61×1.61
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0.805×0.805
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0.322×0.322
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0.161×0.161
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1×
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4.48×4.48
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2.24×2.24
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1.12×1.12
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0.56×0.56
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0.224×0.224
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0.112×0.112
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