Cnc Supported Single Frequency Laser Interferometer Machine Tool Calibration
Negotiable
Min.Order:1
System parameters:
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1. Measuring method: single frequency
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2. Laser frequency accuracy: 0.05ppm
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3. Dynamic capture rate: 50kHz
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4. Warm-up time: about 6 min
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5. Operating temperature: (0-40)℃
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6. Environment temperature: (0-40)℃, humidity: 0-95%
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7. Storage temperature: -20℃-70℃
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Environmental sensors:
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1. Atmospheric temperature sensor : ±0.1℃ (0-40)℃, resolution: 0.01℃
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2. Material temperature sensor: ±0.1℃ (0-55)℃, resolution: 0.01℃
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3. Atmospheric humidity sensor: ±5% RH(0-95%)RH
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4. Atmospheric pressure sensor: ±0.1kPa (65~115)kPa
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Linear measurement:
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1. Measuring range: (0-80)m
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2. Measuring accuracy: 0.5ppm (0-40)℃
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3. Measuring resolution: 1nm
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4. Maximum measuring speed: 4m/s
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Angle measurement:
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1. Axial range: (0-15)m
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2. Measuring range: ±10°
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3. Accuracy: ±(0.02%R+0.1+0.24M)″ (R is indicating value, unit: ″; M is measured length in m)
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4. Measuring resolution: 0.01″
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Flatness measurement:
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1. Axial range: (0-15) m
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2. Flatness measuring range: ±1.5 mm
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3. Accuracy: ±(0.2%R+0.02M2) μm (R is indicating value in μm; M is measured length in m)
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4. Substrate size: 180mm adjustable, 360mm adjustable
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5. Measuring resolution: 0.1μm
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Straightness measurement:
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Item
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Axis range
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Measuring range
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Accuracy
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Resolution
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Short Distance
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(0.1-4)m
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±3.0mm
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±(0.5+0.25%R+0.15M2)μm
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0.01μm
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Long Distance
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(1-20)m
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±3.0mm
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±(5.0+2.5%R+0.015M2)μm
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0.1μm
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Note: R is indicating value in μm; M is measured length in meters
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Perpendicularity measurement:
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Item
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Axis range
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Measuring range
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Accuracy
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Resolution
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Short Distance
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(0.1-3)m
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±3/M mm/m
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±(2.5+0.25%R+0.8M)μm/m
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0.01μm
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Long Distance
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(1-15)m
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±3/M mm/m
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±(2.5+2.5%R+0.08M)μm/m
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0.01μm
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Note: R is indicating value in μm; M is measured length in meters
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Rotary axis measurement:
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1. Measuring range of angle: 0-360°
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2. Max axis rotation speed: 10rpm
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3. Pitch accuracy of precision turntable: ±1″
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4. Resolution: 0.1″
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5. Power Supply: Li-On rechargeable
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6. Signal transfer via wireless bluetooth
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