High Interferometer Made In China Instrument Precision Single Frequency Laser Interference
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Cnc Supported Single Frequency High Precision Laser Interferometer
High Accuracy Coordinate Machine Cnc Tools Laser Interferometer For Measuring Motion Platform
High Accuracy Measuring Motion Platform Laser Interferometer For Parallelism Measurement
Cnc Supported Precision Laser Interferometer For Machine Tool Detection
System parameters:
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1. Measuring method: single frequency
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2. Laser frequency accuracy: 0.05ppm
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3. Dynamic capture rate: 50kHz
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4. Warm-up time: about 6 min
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5. Operating temperature: (0-40)℃
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6. Environment temperature: (0-40)℃, humidity: 0-95%
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7. Storage temperature: -20℃-70℃
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Environmental sensors:
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1. Atmospheric temperature sensor : ±0.1℃ (0-40)℃, resolution: 0.01℃
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2. Material temperature sensor: ±0.1℃ (0-55)℃, resolution: 0.01℃
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3. Atmospheric humidity sensor: ±5% RH(0-95%)RH
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4. Atmospheric pressure sensor: ±0.1kPa (65~115)kPa
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Linear measurement:
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1. Measuring range: (0-80)m
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2. Measuring accuracy: 0.5ppm (0-40)℃
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3. Measuring resolution: 1nm
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4. Maximum measuring speed: 4m/s
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Angle measurement:
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1. Axial range: (0-15)m
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2. Measuring range: ±10°
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3. Accuracy: ±(0.02%R+0.1+0.24M)″ (R is indicating value, unit: ″; M is measured length in m)
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4. Measuring resolution: 0.01″
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Flatness measurement:
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1. Axial range: (0-15) m
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2. Flatness measuring range: ±1.5 mm
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3. Accuracy: ±(0.2%R+0.02M2) μm (R is indicating value in μm; M is measured length in m)
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4. Substrate size: 180mm adjustable, 360mm adjustable
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5. Measuring resolution: 0.1μm
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Straightness measurement:
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Item
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Axis range
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Measuring range
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Accuracy
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Resolution
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Short Distance
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(0.1-4)m
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±3.0mm
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±(0.5+0.25%R+0.15M2)μm
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0.01μm
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Long Distance
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(1-20)m
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±3.0mm
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±(5.0+2.5%R+0.015M2)μm
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0.1μm
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Note: R is indicating value in μm; M is measured length in meters
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Perpendicularity measurement:
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Item
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Axis range
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Measuring range
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Accuracy
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Resolution
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Short Distance
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(0.1-3)m
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±3/M mm/m
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±(2.5+0.25%R+0.8M)μm/m
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0.01μm
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Long Distance
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(1-15)m
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±3/M mm/m
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±(2.5+2.5%R+0.08M)μm/m
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0.01μm
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Note: R is indicating value in μm; M is measured length in meters
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Rotary axis measurement:
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1. Measuring range of angle: 0-360°
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2. Max axis rotation speed: 10rpm
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3. Pitch accuracy of precision turntable: ±1″
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4. Resolution: 0.1″
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5. Power Supply: Li-On rechargeable
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6. Signal transfer via wireless bluetooth
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