Laboratory Level Interferometro Machine Tool Calibration Straightness Measurement Of Guideway Precision Laser Interferometer
Negotiable
Min.Order:1
System parameters:
|
||||||||
1. Measuring method: single frequency
|
||||||||
2. Laser frequency accuracy: 0.05ppm
|
||||||||
3. Dynamic capture rate: 50kHz
|
||||||||
4. Warm-up time: about 6 min
|
||||||||
5. Operating temperature: (0-40)℃
|
||||||||
6. Environment temperature: (0-40)℃, humidity: 0-95%
|
||||||||
7. Storage temperature: -20℃-70℃
|
||||||||
Environmental sensors:
|
||||||||
1. Atmospheric temperature sensor : ±0.1℃ (0-40)℃, resolution: 0.01℃
|
||||||||
2. Material temperature sensor: ±0.1℃ (0-55)℃, resolution: 0.01℃
|
||||||||
3. Atmospheric humidity sensor: ±5% RH(0-95%)RH
|
||||||||
4. Atmospheric pressure sensor: ±0.1kPa (65~115)kPa
|
||||||||
Linear measurement:
|
||||||||
1. Measuring range: (0-80)m
|
||||||||
2. Measuring accuracy: 0.5ppm (0-40)℃
|
||||||||
3. Measuring resolution: 1nm
|
||||||||
4. Maximum measuring speed: 4m/s
|
||||||||
Angle measurement:
|
||||||||
1. Axial range: (0-15)m
|
||||||||
2. Measuring range: ±10°
|
||||||||
3. Accuracy: ±(0.02%R+0.1+0.24M)″ (R is indicating value, unit: ″; M is measured length in m)
|
||||||||
4. Measuring resolution: 0.01″
|
||||||||
Flatness measurement:
|
||||||||
1. Axial range: (0-15) m
|
||||||||
2. Flatness measuring range: ±1.5 mm
|
||||||||
3. Accuracy: ±(0.2%R+0.02M2) μm (R is indicating value in μm; M is measured length in m)
|
||||||||
4. Substrate size: 180mm adjustable, 360mm adjustable
|
||||||||
5. Measuring resolution: 0.1μm
|
||||||||
Straightness measurement:
|
||||||||
Item
|
Axis range
|
Measuring range
|
Accuracy
|
Resolution
|
||||
Short Distance
|
(0.1-4)m
|
±3.0mm
|
±(0.5+0.25%R+0.15M2)μm
|
0.01μm
|
||||
Long Distance
|
(1-20)m
|
±3.0mm
|
±(5.0+2.5%R+0.015M2)μm
|
0.1μm
|
||||
Note: R is indicating value in μm; M is measured length in meters
|
||||||||
Perpendicularity measurement:
|
||||||||
Item
|
Axis range
|
Measuring range
|
Accuracy
|
Resolution
|
||||
Short Distance
|
(0.1-3)m
|
±3/M mm/m
|
±(2.5+0.25%R+0.8M)μm/m
|
0.01μm
|
||||
Long Distance
|
(1-15)m
|
±3/M mm/m
|
±(2.5+2.5%R+0.08M)μm/m
|
0.01μm
|
||||
Note: R is indicating value in μm; M is measured length in meters
|
||||||||
Rotary axis measurement:
|
||||||||
1. Measuring range of angle: 0-360°
|
||||||||
2. Max axis rotation speed: 10rpm
|
||||||||
3. Pitch accuracy of precision turntable: ±1″
|
||||||||
4. Resolution: 0.1″
|
||||||||
5. Power Supply: Li-On rechargeable
|
||||||||
6. Signal transfer via wireless bluetooth
|