Non-Touch 3D Measuring Machine Measurement Instrument Profile And Roughness Tester Contour Surface Profilometer In China
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Non-Touch Nano Technology Measuring Instruments Surface Profilometer In China
Nanometer Nano Technology Laser Scan Profilometer 3D Machine Surface Measuring Instrument
Nanometer Nano Technology Measuring Surface Profilometer In China
High precision Nanometer Level 3D Surface Measurement Instrument Made In China
Light Source
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White/Green LED
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Image System
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1024*1024(Optional 2048×2048)
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Objectives
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10×,50× ,(Optional 2.5×,5×,20×,100×)
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Optical zoom
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1×(Optional 0.5×,0.75×)
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Lens holder
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3 holes(Optional 5 holes)
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XY Stage
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Size
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320*200mm
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Moving range
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140*100mm
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Loading capacity
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10kg
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Control Type
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Motorized
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Resolution
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0.1μm
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Tilt
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±5°(Manual)
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Z Stage
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Moving range
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100mm( Motorized)
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Scanning range
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10mm
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Scanning speed
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45μm/s
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Resolution
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0.1nm
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Reflectivity of testing object
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0.05%~100%
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Step Height measurement
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Accuracy
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0.7%
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Repeatability
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0.1% 1σ
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Zoom ratio of lens
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2.5×
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5×
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10×
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20×
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50×
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100×
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Numerical hole diameter
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0.075
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0.13
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0.3
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0.4
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0.55
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0.7
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Optical resolution @550nm(µm)
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3.7
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2.1
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0.92
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0.69
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0.5
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0.4
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Depth of focus(µm)
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48.6
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16.2
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3.04
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1.71
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0.9
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0.56
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Working distance(mm)
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10.3
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9.3
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7.4
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4.7
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3.4
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2
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Field H×V (mm)
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Video system
1024×1024 |
0.5×
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3.84×3.84
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1.92×1.92
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0.96×0.96
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0.48×0.48
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0.192×0.192
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0.096×0.096
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0.75×
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2.56×2.56
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1.28×1.28
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0.64×0.64
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0.32×0.32
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0.128×0.128
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0.064×0.064
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1×
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1.92×1.92
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0.96×0.96
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0.48×0.48
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0.24×0.24
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0.096×0.096
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0.048×0.048
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Video system
2048×2048 |
0.5×
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8.96×8.96
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4.48×4.48
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2.24×2.24
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1.12×1.12
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0.448×0.448
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0.224×0.224
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0.75×
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6.44×6.44
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3.22×3.22
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1.61×1.61
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0.805×0.805
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0.322×0.322
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0.161×0.161
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1×
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4.48×4.48
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2.24×2.24
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1.12×1.12
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0.56×0.56
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0.224×0.224
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0.112×0.112
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