Product Details

Gas mixing system for CVD furnace and PECVD coating machine

Brief introduction of the gas mixing system:

CYEQ-CGM is a compact three channel anti-corrosion gas mixing & delivery system, which can be put in a small fume-hood together with a tube furnace and be more safe. . All parts wetted with gas are made of PTFE (e.g. valve, pipe, mixing tank

and flowmeter). It is designed for delivering corrosive gases,such as hydrogen sulfide (H2S) and hydrogen selenide

( H2Se) for CVD processing.

gas mixing system

Specification of the gas mixing system:

gas mixing system

Floating meter	Three anti-corrosive Floating Flow-meter made of PTFE material with flowing rates of 100 - 1000 mL/mi (0.1 - 1.0 L/min) One Mechanical Pressure Gauge (mixing tank): 0 - 1.0 MPa, (0.02 MPa/grit)
Valve	Three needle valves made of PTFE material which controls gas out-let on front panel
Gas Tank	500 mL gas tank made of PTFEEach channel gas will flow into the tank for mixing before flow-out
Pipe fitting	Pipe fitting made of PTFE and accept 1/4" pipe (nylon or stainless steel) Three Gas Inlet fittings (from gas tanks) are Installed in right side of cart Two channel gases flow into a gas mixer container and one gas channel independent Two gas outlet fittings (to tube furnace) are installed in left side of cart (one for mixing gas and one independent)12' length 1/4" PTFE pipe is included for immediate use
Dimension	Compact size: 340Lx300Dx 180H, mm ( 13.4"x12"x7"). Net Weight: 16 Lb
Shipping	Shipping dimension: TBD Shipping weight: 50 lbs
Warranty	Two years limited with life time support
Related Products	CVD & PECVD Furnace

More photos of gas mixing system

Company Information

Zhengzhou CY Scientific Instrument Co.,Ltd locate in hi-tech zone, Zhengzhou city.It is a high-tech companies that engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches.Mainly focus on Our main products include:microwave sintering furnace, dental porcelain furnace, tube furnace,muffle furnace,,zirconia sintering furnace,Phosphor powder sintering furnace,crystal sintering furnace, battery material sintering furnace, CVD system, relative accessories and etc. determined to do advanced materials preparation equipment manufacturers and suppliers of leader.