Main Products: Lab muffle furnace ,Tube furnace ,CVD system ,Plasma Cleaner ,Dental zirconia furnace
three gas way gas flow meter for CVD machine and PECVD system with CE
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Min.Order:1 Set
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Zhengzhou CY Scientific Instrument Co., Ltd.
Business Type: Manufacturer,Trading Company
Zhengzhou Henan ChinaMain Products: Lab muffle furnace ,Tube furnace ,CVD system ,Plasma Cleaner ,Dental zirconia furnaceProduct Details
three gas way gas flow meter for CVD machine and PECVD system with CE
Application of gas flow meter
Gas flow control
1.Semiconductor manufacturing industry
2.Vacuum coating equipment
3.Special material surface treatment
4.Gas combustion control
5.Leakage detection system
6.Environment detection and analysis equipment
7.Chemical, petrochemical, metallurgy, optical fiber and etc
Feature of gas flow meter
1.Variety gas way for option
2.304 stainless steel pipe core, corrosion resistance
3.Stainless steel double card quick connector, easy to connect, and no leakage
Technical parameters of gas flow meter
| Model no. | CY-3Z |
| Flow meter type | mass flow |
| Flow meter pipe core material | 304 stainless steel |
| Valve type | electromagnetic regulating valve |
| Pipeline normal condition | close |
| Gas way | 3 gas way |
| Connector size | 1/4" |
| Measurement accuracy | ±1.0%F.S |
| Linearity | ±0.5%F.S |
| Repeat accuracy | ±0.2%F.S |
| Pressure range | .-0.1-0.15Mpa |
| A way range | 0-100SCCM |
| B way range | 0-200SCCM |
| C way range | 0-500SCCM |
| flow control range | 2%-100% |
| Zero temperature drift | 0.6F.S(15-35℃) |
| Respond time | 2S |
| Working temperature | 15-50℃ |
| Working power | AC 220V 50-60Hz |
Pictures of gas flow meter
Packaging of gas flow meter
Shipping and transportation
As customer request. Generally, Our mode of transport are as by sea, by air or rail transport
Payment
T/T, L/C, WEST UNION, PAYPAL, ESCROW AND ETC
Warranty
Main product is 15 month, except wearing parts.
Factory show
Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.
Contact Information
Name:Jane Rao
skypeID:raojane999
qq:2542331489
tel:8618134414225
Web site:
We are looking forward your order of gas flow meter
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