Product Details

Laboratory used gas mass flow controller/3 way MFC Gas Mixer for CVD furnace

Application of MFC Gas Mixing System

Gas flow control

1.Semiconductor manufacturing industry

2.Vacuum coating equipment

3.Special material surface treatment

4.Gas combustion control

5.Leakage detection system

6.Environment detection and analysis equipment

7.Chemical, petrochemical, metallurgy, optical fiber and etc

Feature of MFC Gas Mixing System

1.Variety gas way for option

2.304 stainless steel pipe core, corrosion resistance

3.Stainless steel double card quick connector, easy to connect, and no leakage

Technical parameters of MFC Gas Mixing system

Model no.	CY-3Z
Flow meter type	mass flow
Flow meter pipe core material	304 stainless steel
Valve type	electromagnetic regulating valve
Pipeline normal condition	close
Gas way	3 gas way
Connector size	1/4"
Measurement accuracy	±1.0%F.S
Linearity	±0.5%F.S
Repeat accuracy	±0.2%F.S
Pressure range	.-0.1-0.15Mpa
A way range	0-100SCCM
B way range	0-200SCCM
C way range	0-500SCCM
flow control range	2%-100%
Zero temperature drift	0.6F.S(15-35℃)
Respond time	2S
Working temperature	15-50℃
Working power	AC 220V 50-60Hz

Detailed photos of gas mixing system

Company Information

Zhengzhou CY Scientific Instrument Co.,Ltd locate in hi-tech zone, Zhengzhou city.It is a high-tech companies that engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches.Mainly focus on Our main products include:microwave sintering furnace, dental porcelain furnace, tube furnace,muffle furnace,,zirconia sintering furnace,Phosphor powder sintering furnace,crystal sintering furnace, battery material sintering furnace, CVD system, relative accessories and etc. determined to do advanced materials preparation equipment manufacturers and suppliers of leader.