Name: Three Channel Compact Anti-Corrosion Gas Mixer for CVD , PECVD
Brand: gas mixer
Availability: InStock

Product Details

Three Channel Compact Anti-Corrosion Gas Mixer for CVD , PECVD

Product Description

Brief introduction of the gas mixer:

CYEQ-CGM is a compact three channel anti-corrosion gas mixing & delivery system, which can be put in a small fume-hood together with a tube furnace and be more safe. . All parts wetted with gas are made of PTFE (e.g. valve, pipe, mixing tank

and flowmeter). It is designed for delivering corrosive gases,such as hydrogen sulfide (H2S) and hydrogen selenide

( H2Se) for CVD processing.

Specification of the gas mixer:

Floating meter	Three anti-corrosive Floating Flow-meter made of PTFE material with flowing rates of 100 - 1000 mL/mi (0.1 - 1.0 L/min) One Mechanical Pressure Gauge (mixing tank): 0 - 1.0 MPa, (0.02 MPa/grit)
Valve	Three needle valves made of PTFE material which controls gas out-let on front panel
Gas Tank	500 mL gas tank made of PTFEEach channel gas will flow into the tank for mixing before flow-out
Pipe fitting	Pipe fitting made of PTFE and accept 1/4" pipe (nylon or stainless steel) Three Gas Inlet fittings (from gas tanks) are Installed in right side of cart Two channel gases flow into a gas mixer container and one gas channel independent Two gas outlet fittings (to tube furnace) are installed in left side of cart (one for mixing gas and one independent)12' length 1/4" PTFE pipe is included for immediate use
Dimension	Compact size: 340Lx300Dx 180H, mm ( 13.4"x12"x7"). Net Weight: 16 Lb
Shipping	Shipping dimension: TBD Shipping weight: 50 lbs
Warranty	Two years limited with life time support
Related Products	CVD & PECVD Furnace

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