Specification and model

LD-800A/B

Vacuum Chamber Inner Size

¢800-1000×h800-1000(mm)

Effective coating space

¢700-900×h600-800(mm)

Workpiece rotary frame

Rotation +revolution and rotation

The layout of the  rotary frame

The top of Vacuum Chamber   downward install

Quantity of the hanging rod

4 rotation +8 revolution and rotation

Rotary speed

0-5revolutions/minuterotation

speed governor adjust

The maximum size of the workpiece

¢120-150×h600-800(mm)rotation

Application

tools coating+ decorative coating

Workpiece material

Metal ,glass, ceramics etc.

Film material

TiN, TiAlN, CrN, TiC, TiCN, etc.

Requirement of production space

7×8m

Requirement of capacitance

50Hz 380V 50KVA

Requirement of cooling water

3ton/hour circulating cooling water / 25

Pollutant emission

none

Work noise

≤90decibel

Vacuum air pump

2X-70rough pump+2X-30maintain pump

Roots pump

ZJP-150

Diffusion pump

KT-400

Ultimate vacuum

Overmatch 6×10^-4Pa

Work vacuum

6.67×10^-3 Pa

Exhaust speed

<20minutes(atmospherework  vacuum)

Pressure rising rate(leak rate)

≤0.35Pa/h

Vacuum chamber material

304 stainless steel

Rotary frame material

Carbon steel plating

Cathode voltaic arc ion source

8 dynamoelectric striking the arc   indirect cooling

Target size

¢100×40(mm)

Grid bias power supply

30KW  20KHz Inverter power supply

Voltaic arc power supply

8  0-200A electric current  tunable

Vacuum chamber heating power

18KW  temperature PID adjust

Control model

Automatic(A)

Manually operation(B)

Automatic control system (A)

Industry control

 computer+ PLD+ LCD+ printer