Specification

LD-10C20

Vacuum Chamber Inner Size

¢1000-1200×h1000-1200(mm)

Effective coating space

¢900-1100×h800-1000(mm)

Vacuum chamber material

304stainless steel

Vacuum chamber material thickness

Inner 8mm, outer 3mm,Interlayer water cooling pipes

Vacuum chamber inner lining

double-layer  stainless steel  of inner liningδ0.8mm

Vacuum Chamber door

Cut Gate  Net thickness  of door frame equal or greater than 28mm   Hinge

Sputtering rake installation door

Bilaterians open on both sides of the vacuum chamber

Sputtering rake baffle

Stainless steel movable sputtering target platens

structure heat-resistant temperature

Equal or less than 500°C

Work piece rotary frame

Rotation + revolution and rotation

Quantity of the hanging rod

Can design according to the workpiece quantity

The layout of the  rotary frame

The top of Vacuum Chamber   downward install

Turntable material

gear carbon steel electroplating

Hanging a turntable spindle seal

Magnetic fluid seal  Or  Oil seal

Rotary speed

0-5revolutions/minute(rotation)speed governor adjust

The maximum size of the workpiece

¢150-180×h750-950(mm)

Application

Tools coating +Decorative coating

Work piece material

Metal, glass, ceramics

Film material

TiN TiAlN CrN TiC TiCN etc.

Color coating layer can be

Gold, Silver, Purplish black, Brown, Black, Blue,  Rainbow, etc

Requirement of capacitance

50Hz 380V 70KVA

Electricity  production

Equal or less than 40KW/H

Requirement of cooling water

Equal or greater than 3on/hour circulating cooling water/ 25°C

cooling water pressure

3-5KG

Pollutant emission

no

Work noise

Equal or less than 90decibel

Vacuum air pump

2X-70Rotary vane pumps

Maintain pump

2X-30Rotary vane pumps

Roots pump

ZJP-300

Diffusion pump

KT-500

Ultimate vacuum

Overmatch6×10¯4 Pa

Work vacuum

6.67×10¯3 Pa

Exhaust speed

Less than 20minutes(atmosphere—work vacuum)

Pressure rising rate(leak rate)

equal or less than 0.35Pa/h

Coating the heating temperature

Common  350-430°C

Temperature control

PID smart  temperature control

Grid bias power supply

35KW  20KHz Inverter power supply

Magnetron sputtering rake

Rectangular symmetric 2 non-equilibrium directly to the cooling

the size of the sputtering

w150×h850-1050(mm)

The size of the sputtering rake thin

w100×h800-1000×δ12(mm)

Center columnar sputtering target

Two Center columnar sputtering targets

Columnar target structure

Target materials rotating, Crucial directional target

Size of columnar sputtering target

¢70×h850-1050(mm)

Magnetron sputtering power

Intermediate frequency pulse: 40KHz, power:35KW

Plane target layout

The furnace door and vent

Columnar target layout

Vacuum chamber center

Coating  chamber heating power

20KW  Heating  tube heating

Vacuum  Measurement

3 measuring point wide-range compound vacuum gauge

Gas Mass Flow Meter

4gas mass flow controller

Gas  Flow Control

Four-way adjustable gas flow figures

Vacuum chamber distribution gas

Four posts close to furnace wall evenly distributed

System control

6 way pneumatic valve, Safety  interlock

Air operated barometric pressure source

General air compressor

Coating System control

Voltage Display Current Regulator Automatic recovery

Water distribution

Water pressure directed The waterways of independent switches

Exhaust pipes and valves

High vacuum valve  Separate ways valve

Control cabinet and cables

Input and output cables and other power distribution terminal row

Alarm  System

Water phase without water break alarm

Shutdown System

E-stop+ Electric control cabinet + Delay Shutdown

Coating Operation Process

8-10 kinds of tools for supporting coating processes

Control mode

Automatic(A), Manual operation(B)