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Product Details

Specifications

1.extend workpiece service life
2.improve the workpiece hardness
3.enhance wear resistance

The specification of LD-820 multiple multi-arc + magnetron sputteringion vacuum coating equipment

A-Computer automatic control B-switch board manual

Specification and model	LD-820A/B	Remarks
Vacuum Chamber Inner Size	¢900-1000×h900-1000(mm)	The size can be increased or decreased±10%
Effective coating space	¢800-900×h700-800(mm)	The size can be increased or decreased±10%
Workpiece rotary frame	Rotation + revolution and rotation	Design according to the specific requirements
The layout of the rotary frame	The top of Vacuum Chamber downward install	lower, upward install, can be instead
Quantity of the hanging rod	4 rotation +8 revolution and rotation	Can design according to the workpiece quantity
Rotary speed	0-5revolutions/minuterotationspeed governor adjust	variable-frequency governor
The maximum size of the workpiece	¢170-180×h650-750(mm) rotation	Hanger quantities and rotation radius
Application	Tools coating+ Decorative coating
Workpiece material	Metal, glass, ceramics, plastics etc.	Almost all material
Film material	TiN, TiAlN, CrN, TiC, TiCN, etc.	Tools film, Multilayer film, Decorative film
Requirement of production space	7×8m	Leave the space of operation and maintenance
Requirement of capacitance	50Hz 380V 70KVA	Installed capacity not practical power consumptive
Requirement of cooling water	3ton/hour circulating cooling water/ 25
Pollutant emission	none	None exhaust gas, wastewater, none scrap
Work noise	≤90decibel
Vacuum air pump	2X-70rough pump+2X-30maintain pump
Roots pump	ZJP-150	Can increase
Diffusion pump	KT-400	Can replace molecular pump according to the requirement
Ultimate vacuum	Overmatch 6×10^-4Pa
Work vacuum	6.67×10^-3 Pa
Exhaust speed	<20minutes(atmospherework vacuum)	Normal temperature
Pressure rising rate(leak rate)	≤0.35Pa/h
Vacuum chamber material	304stainless steel
Rotary frame material	8 dynamoelectric striking the arc indirect cooling	Direct cooling can instead
Target size	¢100×40(mm)
Magnetron sputtering target	2(direct cooling)	Indirect cooling can instead
Sputtering target size	w100-150×h700-800(mm)
Grid bias power supply	30KW 20KHz Inverter power supply	The power can change according to the capacity
magnetron sputtering power supply	30KW 40KHz intermediate frequency pulse power source
Voltaic arc power supply	8 0-200A electric current tunable
Vacuum chamber heating power	18KW temperature PID adjust
Control mode	Automatic(A) Manually operation(B)	Automatic control type have hand control
Automatic control system (A)	Industry control computer+ PLD+ LCD+ printer	Can control by touch screen

Note: would you please let us know the following information, before we quote the machine for you.

1. what is the name of the workpiece which you want to coat? It is highly appreciated that if you can send us the picture of your workpiece.

2.the material and the size of the workpiece.

3.how many workpieces do you want to coat at the same time, it will help us design the suitable vacuum chamber which is the most important fact of the price.