poly silicon sputtering target

Type:           Mono crystalline Si target and Poly crystalline Si target

Purity:         Si: 99.999% min., 99.999% min. and 99.9999% min.

Resistivity: 0.005-0.02ohm·cm 

                      0.5-5 ohm·cm

                      100ohm-cm max

Sizes:      

Length: 320mm max.

Width: 140mm max.

Thickness: 3mm-12mm

Diameter: 280mm max.

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