Si sputtering target

Silicon Target  for vacuum sputtering

Purity: Si 99.99% min. , 99.999% min ,Si 99.9999% max.

Resistivity: 0.2 ohm/cm min.

Dimension

Length:300mm max.

Width:140mm max.

Thickness: 3-12mm max.

Diameter: 280mm max.

Shape: square, rectangle, U shape or as per customer's drawing.

Type: mono crystal and poly crystal with boron or phosphorus doped

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