Silicon sputtering Target

mono crystalline silicon targets are used in decorative coating industry. 

Type: mono crystal and poly crystal Si target

Purity:  Si:99.99% min, Si:99.999% min. and 99.9999% min.

Resistivity: 0.02ohm·cm max.

                       0.1-100 ohm-com

Dimension: Length: 320mm max.

                      Width: 290mm max.

                      Thickness: 1mm-10mm

                      Diameter: 280mm max.

Tolerance: +/-0.005" or +/-0.1mm