Sliding RTP Tube Furnace with quartz tube / RTP annealing tube furnace
Introduction of the sliding RTP tube furnace
CYKY-OTF-1200X-80SL is a CE certified slide-able tube furnace with 3"IDx55" L quartz tube and flanges and a maximum working temperature up to 1200°C. One pair of sliding rail is installed on bottom of furnace to allow sliding the furnace from one side to another to achieve max. heating and cooling rates up to 100°C/min. For fastest heating, the furnace may be pre-heated to a desired temperature and then be slided to the sample's position. As for fastest cooling, the furnace can be slided to another side after sample heating is completed. Moreover, the heating and cooling rates may reach 15°C/s under vacuum or inert gases. This furnace provides an alternative for rapid thermal processing at the lowest cost.
Specification of the sliding RTP tube furnace
Furnace Structure | - Double layer steel structure with dual air cooling fans
- One pair of sliding rails are installed on bottom of furnace, which allows furnace to be manually moved from side to side
- Vacuum flanges and a digital vacuum gauge are installed for immediate use.
- Slding rail length is about 1200mm, the furnace can slide 600 mm distance
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Power | 2.5KW |
Voltage | AC 208-240V Single Phase, 50/60 Hz |
Max. Temperature | 1200°C (<1 hour) |
Continuous Temperature | 1100°C |
Heating& Cooling Rates
| Heating Rate: 15°C/sec (RT - 150°C); 10°C/sec (150°C - 250°C); 7°C/sec (250°C - 350°C); 4°C/sec (350°C - 500°C); 3°C/sec (350°C - 550°C); 2°C/sec (550°C - 650°C); 1°C/sec (650°C - 800°C); 0.5°C/sec (800°C - 1000°C); | Cooling Rate: 15°C/sec (1000 - 950°C); 10°C/sec (950°C - 900°C); 7°C/sec (900°C - 850°C); 4°C/sec (850°C - 750°C); 2°C/sec (750°C - 600°C); 1.5°C/sec (600°C - 500°C); 1°C/sec (500°C - 400°C); 0.5°C/sec (400°C - 300°C); | Note: The max heating and cooling rate is achieved by pre-heat one side of processing tube to the target temperature and then slide the furnace to the other side. You may choose to place t he sample in the pre-heat area or not. |
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Heating Zone Length | 440mm ( single zone ) |
Constant Temperature Zone | 120mm (+/-1°C @ 400-1200°C) |
Heating Elements | Fe-Cr-Al Alloy doped by Mo |
Processing Tube Size | High purity fused quartz tube Size: OD: 3.2" x ID: 3.0" x Length: 55" (inch) or OD: 80 x ID 75 x Length 1400 ( mm) Two foam ceramic blocks are included which must be placed inside tube to avoid heat radiation damaging O-ring |
Temperature Controller | - PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
- Built-in over temperature alarm and protection allows for operation without attendant.
- Two K type thermal couples are included. One is bilt in furnace to control furnace temperature, and another
- in serted into tube to monitor sample real temperature profile.
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Temperature Accuracy | +/ - 1°C |
Vacuum Flanges | - Stainless steel vacuum flanges are installed on both ends of tube with heavy duty support.
- Right flange: KF-25 pump connector and needle valve.
- Left flange: one needle valve and 1/4" thermocouple feed-through and digital vacuum gauge.
- An 24" length x 1/4" dia. K type thermocouple (included) connected to an Omega temperature calibrator (included) will be inserted through this flange to monitor the heating and cooling rates of the sample's position during furnace sliding.
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Vacuum Level | - Limited by pump ( pump is not included, click on pictures to order )
- 10E-5 torr can be reached by molecular pump
- 10E-2 torr by mechanical pump.
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Sliding Rails / Table | |
Dimensions | |
Net Weight | ~ 110 Kg |
Shipping Package Size | 70" x 45" x 45" (inch) |
Shipping Weight | 350 lbs |
Warranty | One year limited |
Compliance | |
detailed photos of the Sliding RTP tube furnace / fast cooling tube furnace
sliding RTP tube furnace with touch screen temperature controller
The detailed requirement of the sliding RTP tube furnace can be designed as your requirement!!!
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