Name: Mini graphite tube furnace Mini Graphene film CVD Quartz Tube Furnace upto 1200C with digital gauge
Brand: CYKY
Availability: InStock

Product Details

CYKY mini CVD tube furnace with 3 MFCS / CVD furnace system

Introduction of mini graphite furnace

The CY-1200CVD series furnace workstation consists of a CY-O1200 series mini tube furnace,

a precision mass flow gas control station, a high vacuum station and other assembling parts.

The max. working temperature of this workstation is 1200C. The ultimate vacuum rate goes to

10^-5 torr .The mass flow gas control station mixes three kinds of gas together and input the mixed

gas into a fused quartz tube inside the furnace. It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protected.

mini graphite furnace

Specification of mini graphite furnace

Product	CY-1200CVD system
Chamber Type	Split Chamber
Display	LED digital display
Chamber Material	Alumina Fiber
Heating Element	Resistance wire
Max Temperature	1200°C
Usable Range	≤1100°C
Heating Rate	≤20°C(suggestion:10°C/min)
Heating Zone	Single
Heated length	220mm
Length constant temperature	100mm
Tube Material	High purity quartz
Tube Size	Φ50mm x700mm
Vacuum Seal	1.03×10-3Pa
Temperature Control	PID automatic control via SCR power control
Accuracy	±1°C
Preset curve	10
Thermocouple	K Type
Working Voltage	220V 50Hz~60Hz
Max. Power	1.8KW
Gas Channels	3 gas channels (can be designed as your requirement)
Gas controller	MFCS with range of 0 -500 sccm
Vacuum pump	10 Pa Rotary vacuum pump 10(-4) Pa high vacuum pump system