Product Details

Product Description

Tube furnace with gas flow and vacuum provision/Laboratory tube furnace for thermal CVD

Featrues of Laboratory tube furnace

1.Upper and lower sub-structure, easy to pick and place tubes
2.High purity quartz tube, resistance high temperature 1200 ℃
3.Programmable and PID automatic control
4.Metal key or touch panel operating interface for your option

5.Imported energy saving chamber material

6.Furnace using double liner structure, the middle has gap isolation, even if the furnace temperature up to 1000 Chang, furnace surface remains safe to touch

7.Furnace is equipped with an output voltage and output current detection table, can see the real time heated condition

Technical parmaters of Laboratory tube furnace

Model	CY-O1200-60IC150-D3ZH
Limiting temperature	1200℃
Working temperature	≤1150℃
Heating rate	Suggestion 0~20℃/min
Temperature zone	Single
Temperature accuracy	±1℃
Chamber size	Φ60×1200(mm)
Heating element	SiC
Thermal couple	B Type
Temperature control	PID automatic control via SCR power control
Heating curves	30 steps programmable
Chamber material	Imported fiber
Heating zone	440mm
Thermostatic zone	300mm
Tube material	high purity corundum
Tube length	1000mm
Sealing type	stainless steel vacuum flange
Tightness	4.03*10^-3Pa
Current and voltage Monitoring	Analog galvanometer
Main power	2.5kw
gas way	3 gas can be connected
A way range	100SCCM
B way range	160SCCM
C way range	500SCCM
Gasline pressure	-0.1-0.15Mpa
System vacuum	5-10Pa
Pump connection	KF16 stainless steel Bellows, KF16 clamps, KF16 flapper valve
Vacuum meter	mechanical vacuum gauges, or electronic vacuum gauges
Working voltage	220V 50-60Hz
Standard accessories	Quartz tube, vacuum flange, tube blockage, O-ring, protective gloves, crucible furnace hook, PTFE tube, stainless steel fittings, stainless steel bellows, adapter, 5mm hex wrench