CVD System consists of tube furnace,gas supply system and vacuum unit. | |
Split vacuum tube furnace BTF-1200C | BTF-1200c can supply vacuum&atmosphere protection environment . It is easy to installation and dispatch.From the transparent quartz chamber,the state of sintering can be observed. Pneumatic spring structure make the operator easy to open it. |
Tube size | Φ50 ×1000mm(tube size can be optional) |
Heating element | Fe-Cr-Alloy adopted by Mo |
Zone length | Heating :440mm Constant:200mm |
Temperature controller | *30 programmable segments for precise control of heating rate ,cooling rate and dwell time. *Built in PID automatic tune function with overheating&brocken thermocouple brocken protection and over temperature protection and alarm allows for operation without attendants. |
Accuracy | ±1℃ |
Suggest heating rate | 15℃/min |
Standard accessories | quartz tube 1 pcs,stainless steel sealing flange 1set,silicon sealing ring 2set,high temperature glove1pair,quartz block1 pc. |
Gas-supply system 3 channels MFC,GMF-3Z | |
Connector style | Double cutting ferrule stainless steel connector |
Standard range(N2) | 50sccm、100sccm、200sccm(optional) |
Accuracy | ±1.5%FS |
Linearity | ±0.5~1.5% |
Working pressure range | 0.1~0.5 MPa |
ure | 3MPa |
Connector | Φ6,1/4'' |
Display | LCD touch screen 3 figrues show |
Working tem. environment | 5~45 High purity gas |
Pressure vacuum gauge | -0.1~0.15 MPa(0.01 MPa/grid) |
Inter&exter Parabolic ss pipe | Φ6 |
Low vacuum unit,Vau-02 | |
Relative air humidity | ≤85% |
Working voltage | 220V±10% 50~60HZ |
Air bleed rate | 8m³/h |
Experiment vacuum | 1.0X10-1Pa |
Oil capacity | 1.1L |
Inlet/Outlet caliber | KF25 |
Rotation rate | 1450rpm |
Noise | 50dB |