CVD system for 2D material production

CVD system for 2D material production

Negotiable /Set

Min.Order:1 Set

Supply Ability:
100 Set / Sets per Month
Payment Terms:
T/T

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Place of Origin:
China

Anhui BEQ Equipment Technology Co.Ltd.

Business Type: Manufacturer
Main Products: tube furnace ,muffle furnace ,CVD system ,Sublimation equipment for OLED material

Product Details

Main features:

 

 

1) This device provides two independent sliding temperature fieldsindependently controlled. The heating zone of each temperature field is 230mm long. It can advance or push away the sample during the experiment, providing two positions of rapid rise and  cooling

2)Longitudinal multi-interface vacuum flange design, various additional interfaces are highly scalable. The aviation aluminum alloy flange bracket is beautiful in appearance, light and strong, corrosion-resistant, and easy to install and adjust. It is inconvenient to avoid the adjustment and adjustment of the traditional sheet metal flange bracket. When installing various accessories, it is easy to cause the flange to leak or even the quartz tube to be accidentally broken.

3)the flange end is sealed by a clamp, which makes the feeding and discharging more convenient.

4)It adopts touch screen  control, parameter setting and operation are intuitive and convenient, and parameters are automatically recorded and maintained.

5)Gas supply system can be configured with several mass flow meters according to the customer's experimental requirements. The flow meter's range can also be selected in different configurations. The vacuum system can also be configured with various vacuum pumps according to customer requirements.

 

Technical Parameters

Furnace

Max. Temp

1200°C

Power

2KW (220V)

zone length

Heating230+230mm

Constant80+80mm



Temperature Controller

 

PID automatic control and auto-tune function.

30 programmable segments for precise thermal processing.

Built-in protection for the over-heated and broken thermocouple. 

Operation interface is 10  touch screen

Heating Elements

 

· Resistance wire, Fe-Cr-Al Alloy doped by Mo

Temperature Accuracy

 

+/- 1 °C

Processing tube

Size:Φ50*1200mm

Gas supply system

Connector style

Double cutting ferrule stainless steel connector

Standard range(N2)

50sccm100sccm200sccm500sccm optional

Accuracy

· ±1.5%FS

Response time

Gas characteristics14sec

Electrical characteristics:10sec

Linearity

±0.51.5%

Working pressure difference range

0.10.5MPa

Max. pressure

· 3MPa

Pressure vacuum gauge

0.10.15 MPa, 0.01 MPa//grig

Vacuum unit

Relative air humidity

85%

pumping

10m³/h

vacuum

10-1Pa

Oil capacity

1.1L

Rotation rate

1450rpm

Noise

50dB


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