6-inch wafer Cassettes are conventional 13 slots metal cassettes used in semiconductor manufacturing operations. They are typically used in areas where wafer positioning is important or where elevated temperatures cause warpage to other carriers. 6-inch wafer Cassettes are direct replacements for many OEM metal carriers used with wafer track/elevator systems, photo resist bake systems, and robotic loading systems for CVD and etch processes. This series has been incorporated as the original equipment carrier provided by similar OEM’s.