Piezoresistive Silicon Pressure Sensor for medium pressure ranges
SPM402 Series Piezoresistive Silicon Pressure Sensors General Description
The SPM 402 Series offers piezoresistive silicon, stainless steel pressure sensors. Media isolated sensors are designed to operate in hostile environments, yet provide the outstanding sensitivity, linearity, and hysteresis of a silicon sensor. This pressure sensor is compatible with 316L stainless steel, a type of steel that increases corrosion resistance, improves resistance to pitting from chloride ion solutions, and provides increased strength at high temperatures.
The piezoresistive sensor chip is housed in a fluid-filled cylindrical cavity and isolated from measured media by a stainless steel diaphragm and body. The oil-filled cavity in this unique pressure sensor design is at a minimum volume so the accuracy is greatly improved. The SPM 402 silicon pressure sensor is a thermally compensated device and has a millivolt output of up to 210mV at a 1mA supply current (or supply voltage 10V). This new pressure sensor offers design engineers excellent performance in various applications, especially for mid to high pressure and smaller solutions.
SPM402 Series Piezoresistive Silicon Pressure Sensors Features
• Calibrated and compensated
• With media separation
• Excellent chemical resistance
• O-ring mounting
• Pressure ranges: 5 to 500 psi
SPM402 Series Piezoresistive Silicon Pressure Sensors Applications
• Industrial
• Pneumatic and hydraulic components (e.g. valves, pumps)
• Level measuring (e.g. environmental technology)
• Process industry
SPM402 Series Piezoresistive Silicon Pressure Sensors Specifications
All parameters are measured at supply current 1 mA at reference conditions unless otherwise specified.
| Standard Pressure Ranges | |||||||||||||
| PSI | bar | Output signal (Offset) [mV] | Output signal (Span) [mV] | Proof pressure [PSI/bar] | Negative pressure [PSI/bar] | Burst pressure [PSI/bar] | |||||||
| min. | typ. | max. | min. | typ. | max. | ||||||||
| 5 | 0.35 | -2 | 0 | 2 | 50 | 75 | 100 | 30 | 2 | -- | -- | 45 | ≥ 3 |
| 15 | 1 | 100 | 145 | 210 | 75 | 5 | -- | -- | 112 | ≥ 7.5 | |||
| 30 | 2 | 95 | 150 | 200 | 150 | 10 | -- | -- | 225 | ≥ 15 | |||
| 50 | 3.5 | 80 | 125 | 180 | 250 | 17.5 | -- | -- | 375 | ≥ 25 | |||
| 100 | 7 | 100 | 150 | 210 | 500 | 35 | -15 | -1 | 750 | ≥ 50 | |||
| 300 | 20 | 95 | 150 | 200 | 1200 | 80 | -15 | -1 | 1800 | ≥ 120 | |||
| 500 | 35 | 1200 | 175 | 240 | 1500 | 105 | -15 | -1 | 3150 | ≥ 210 | |||
| Supply / Performance | |||||||||||||
| min. | typ. | max. | |||||||||||
| Supply current [mA] | - | 1 | 3 | ||||||||||
| Supply voltage [V] | - | - | 10 | ||||||||||
| Linearity [% FSO BFSL] | -0.25 | ± 0.1 | 0.25 | ||||||||||
| Hysteresis [%FSO] | -0.05 | ± 0.03 | 0.05 | ||||||||||
| Input impedance [kΩ] | 4.0 to 6.0 | ||||||||||||
| Output impedance [kΩ] | 4.0 to 6.0 | ||||||||||||
| Insulation resistance [MΩ] | 50 (between housing and sensor chip) @ 50 V DC | ||||||||||||
| Thermal errors | |||||||||||||
| min. | typ. | max. | |||||||||||
| TC Offset [% FS0/10K] | -0.7 | -0.1 | 0.7 | ||||||||||
| TC Span [% FS0/10K] | -2.4 | -1.9 | -1.6 | ||||||||||
| TC resistance [%/10K] | 2.4 | 2.75 | 3.3 | ||||||||||
| All parameteres are measured in the temperature range of 0 to 70 °C (32 to 158 °F) | |||||||||||||
| Operating temperature ranges | |||||||||||||
| Media | -40 to 125 °C (-40 to 257 °F) | ||||||||||||
| Storage | -40 to 125 °C (-40 to 257 °F) | ||||||||||||
| Mecanical stability | |||||||||||||
| Vibration | 10 g RMS (20 to 2000 Hz) | ||||||||||||
| Schock | 100 g / 11 ms | ||||||||||||
| Electrical conditions | |||||||||||||
| Standard | 4 solder pads ppitch 2.54 | ||||||||||||
| Materials | |||||||||||||
| Housing | Stainless steel 316L (1.4404) | ||||||||||||
| Diaphragm | Stainless steel 316L (1.4435) | ||||||||||||
| Media wetted parts | Housing, diaphragm | ||||||||||||
| Miscellaneous | |||||||||||||
| Installation position | any | ||||||||||||
| Protection class | IP 00 | ||||||||||||
| Weight | Standard: approx. 10 g | ||||||||||||
| Sealing | O-Ring 15.5 x 1.5 (material: FKM) | ||||||||||||
SPM402 Series Piezoresistive Silicon Pressure Sensors Ordering Codes