Name: MFC2030/MFC2070 Bi-Directional Digital MEMS Gas Flow Sensor
Brand: MEMSIC
Availability: InStock

Product Details

High Performance Bi-Directional
Digital MEMS Gas Flow Sensor
MFC2000 Series

MFC2030/MFC2070 Digital MEMS Gas Flow Sensor DESCRIPTION
MFC2000 series is a new gas flow sensing module platform based on MEMSIC’s proprietary CMOS technology for thermal mass flow sensing. It can measure up to 70 SLM bi-directional flow rate with +/-3.0% accuracy.

The sensing element is monolithically integrated with CMOS signal processing circuitry and embedded software capable of converting gas flow rates to a digital or analog output with very high repeatability. The module has very low operating power consumption (<5 mA) and a low power consumption sleep mode (<100 µA) for optimal power management in portable applications. The MFC2000 series is externally powered, up to 5.5V (3.3V typ.). I2C digital output is standard. Other output available upon request.

MFC2030/MFC2070 Digital MEMS Gas Flow Sensor FEATURES
• Bi-directional flow
• High dynamic range
• ±3% m.v. accuracy
• ±0.6% m.v. repeatability
• Low power consumption
• Fast response time
• Single 2.7 - 5.5Vdc power supply
• Digital I2C and analog outputs
• Standard fitting sizes
• Custom fluid connector available
• Temperature compensated
• Highly configurable firmware
• Easy-to-use PC-based GUI
• RoHS and WEEE compliant

MFC2030/MFC2070 Digital MEMS Gas Flow Sensor APPLICATIONS
• Medical gas flow measurement and control
• Industrial gas flow measurement and control
• Consumer products

MFC2030/MFC2070 Digital MEMS Gas Flow Sensor CHARACTERISTICS
(Measurements performed with air at 23°C temperature, 1 Atm pressure, 50% RH, at 5.0V DC power supply, unless otherwise specified). Calibration conditions for standard liters per minute slm: 20°C, 1013mbar.

Parameter	Condition		30 SLM	70 SLM	Unit
Measurement Range	Direct port		+/- 30	+/- 70	SLM
Flow Direction			Bi-directional		N/A
Supply DC Voltage (VDD)			2.7 - 5.5		Vdc
Interface Voltage (VDDIO)	(See note 1)		2.7 - 3.0		V
Output Range	I2C Mode		0 - 65,535		LSB
	Analog Mode		0 - VDDIO		Vdc
Operating Temperature			(20) - 80		°C
Calibrated Temperature			0 - 50		°C
Storage Temperature			(40) - 85		°C
Relative Humidity	non-condensing		0 - 95		%
Supply Current	Continuous, Fs = 100Hz		5		mA
	Sleep mode		100		µA
Accuracy	1% Qmax ≤ Q <100% Qmax		3.0		% m.v.
	Q <1% Qmax		0.03		% FS
Repeatability	ODR =100Hz	0.1Qmax ≤ Q ≤ Qmax	0.6		% m.v.
		Q <0.1Qmax	0.06		% FS
	ODR =10Hz	0.1Qmax ≤ Q ≤ Qmax	0.2		% m.v.
		Q <0.1Qmax	0.02		% FS
	ODR =1Hz	0.1Qmax ≤ Q ≤ Qmax	0.05		% m.v.
		Q <0.1Qmax	0.005		% FS
Offset Shift w/Temp.	0 - 50°C		2		SCCM/°C
Span Shift	0 - 50°C		0.1		% m.v./°C
Pressure Drop	Q max		4	18	mbar
Sample Rate/Response Time			10		ms
Orientation Sensitivity			TBD		% m.v
Wake Time	Wake up from sleep mode		40		ms
Working Pressure			0 - 8		Bar
Module Weight	Includes aluminum inserts		<100		g
Wetted Material	Si, SiO 2 , Si 3 N 4 , Aluminum, PPSU, Stainless steel, Viton, Nitrile rubber, Aluminum alloy 3003, Epoxy, Silicone

MFC2030/MFC2070 Digital MEMS Gas Flow Sensor ABSOLUTE MAXIMUM RATINGS

Supply Voltage (VDD)	2.7 to +5.5V
Storage Temperature	-40°C to +85°C
Pressure	0 - 8 Bar Gauge
Shock	10g, 0.5ms
Vibration	1g, 5 to 200 Hz
ESD	4kV/8kV (contact/air discharge)

MFC2030/MFC2070 Digital MEMS Gas Flow Sensor ORDERING INFORMATION