Features:
Arched single disc work, to a greater extent to meet customer needs for uniformity rotation 5-30r / min, continuously variable transmission.

Arched three working disk, planets known autobiography, production to meet customer requirements, the rotation 5-30r / min, continuously variable transmission.
Molecular pump KT-600, Roots pump ZJ-300, mechanical pump 2X-70, to maintain the pump 2X-8, 304 stainless steel piping.

Ultimate vacuum: better than 6 * 10^-4Pa.
Configure anti-turbulence devices, safety interlocks, manual, automatic optional.

Heating pipe heating, PID control, the maximum 350^.C ± 1.5^.C.
Gas quality control instrument or manually fine-tune the inflation valve.
DC 3KV, 0.6KW rod-shaped cathode (before coating for self-cleaning of the work) and the gas ion source matching.

Plasma cleaning machine-surface treament technology:

plasma cleaning-plasma etching-plasma stripping-plasma activation

plasma cleaning machine for cleaning.etching,activation and surface preparation.Choose 40KHz,13.56MHz and 2.45GHz three kinds of RF generator to meet the different needs of cleaning efficiency and cleaning effect.

Plasma cleaning machine with a low-cost,flexible  operation, features, mainly for high-tech industry in the following:

1. Semiconductor, microelectronnic.                                    7. Biological Engineering.                

2. Integrated circuit  electronics industry.                            8. Medical.

3. Vacuum electronnics industry.                                         9. solar panels.

4.Textile industry.                                                               10. Plastics and rubber. 

5. The automotive industry.                                                11. R&D. 

6. Aerospace.                                                                      12. Archaeology.

Plasma cleaning machine has the following characteristics:

1. More flexibility to operate,easy to change the type of gas processing and handling procedures.

2. The operator's body does not cause any harm.

3. The cost for the plasma treatment is negligible.

Widely used in plasma processing equipment:

Plasma cleaning, etching,plasma coating, plasma ashing and surface modification applications.Through its treatment,can improve the surface wetting ability,so that a variety of materials can be coated,etc, to enhance adhesion,bonding force,while removal of organic pollutants,oil or grease.