Compound Molecular Pumps
USD $7,500 - $8,600 /Set
Min.Order:1 Set
Shanxi Province Yangquan Metals & Minerals Imp. & Exp. Co., Ltd.
Compound Molecular Pumps
FF Series Compound Molecular Pumps
FF series compound molecular pump is one of mechanical vacuum pumps which gaining super high vacuum by high speed rotator carrying gas molecules. It is constituted by turbo molecular pump and disc tractive pump. It simultaneously got speedy pumping, high compressed rate features of turbo molecular pump during molecular flow, and speedy pumping, high compressed rate features of tractive pump when with high pressure, except that it also extended the application scope of compound molecular pump.
Model | F100/150 | FF160/500 | FF160/620 | FF160/620 | FF160/620N | FF160/700 | FF200/1200 | FF200/1300 | F250/1500,1600,1800 | F400/3500 | |||||||||||
Order No. | 3012 | 3104 | 3105 | 3110 | 3106 | 3111 | 3107 | 3112 | 3108 | 3113 | 3019 | 3114 | 3115 | 3117 | 3116 | 3118 | 3119 | 3120 | 3121 | 3125 | |
Inlet flange | LF100 | CF100 | LF160 | CF150 | LF160 | CF150 | LF160 | CF150 | LF160 | CF150 | LF160 | CF150 | LF200 | CF200 | LF200 | CF200 | LF250 | LF400 | |||
Outlet flange | KF25 | KF40 | KF50 | KF40 | LF100 | ||||||||||||||||
Pumping speed rate | L/S | 150 | 500 | 600 | 700 | 1200 | 1300 | 1600 | 1600 | 1800 | 3500 | ||||||||||
Compression rate N2/H2 | 1×10 8 /5×10 2 | 1×10 9 /6×10 3 | 1×10 9 /6×10 4 | 1×10 9 /6×10 3 | 1×10 9 /6×10 | 1×10 9 /6×10 3 | 1×10 8 /5×10³ | 1×10 8 /5×10 2 | |||||||||||||
Limit pressure | Pa | 6×10 -6 | 6×10 -7 | 6×10 -6 | 6×10 -7 | 6×10 -6 | 6×10 -7 | 6×10 -7 | 6×10 -8 | 6×10 -6 | 6×10 -7 | 6×10 -7 | 6×10 -8 | 1×10 -6 | 1×10 -7 | 6×10 -6 | 6×10 -7 | 6×10 -6 | 1×10 -6 | 6×10 -6 | |
Motor rotation | Rpm | 42300 | 24000 | 27000 | 36000 | 27000 | 36000 | 27000 | 24000 | 21000 | 27000 | 13500 | |||||||||
Begin time | Min | ‹2 | ‹5 | ‹6 | ‹7 | ‹4 | ‹6 | ‹8 | ‹18 | ||||||||||||
Bearing | Commom Braring | Cermic Bearing | Commom Braring | Cermic Bearing(Uncorruptible and protect the gas) | Cermic Bearing | Commom Braring | Cermic Bearing | ||||||||||||||
Vibrating valve | µm | ≤0.1 | ≤0.5 | ||||||||||||||||||
Forepump | L/S | 2 | 4~8 | 15 | 30 | ||||||||||||||||
Cooled water temperature | ºC | ≤25 | |||||||||||||||||||
Baking temperature of the pump body | ºC | ≤100 | |||||||||||||||||||
Oil capacity | ML | 2*6 | 150 | Grease | 150 | Grease | 150 | Greas | 150 | ||||||||||||
Installration direction | Vertical or horizontal | Vertical±5° | Ang angle | Vertical±5° | Ang angle | Vertical±5° | Ang angle | Vertical±5° | |||||||||||||
Weight | KG | 8 | 29 | 19 | 39 | 29 | 60 | 47 | 42 | 136 |