Product Name

Silicon Rotary Target

Crystalline Type

Mono and Poly

Conductivity Type

P Type

Purity

5N 99.999%

Resistivity

0.005-0.02 ohm-cm

Specifications

Length

225mm max. each tube

Outer diameter

163mm max.

Inner diameter

135mm

Regular WT

6mm/9mm/14mm

Tolerances

As per drawing

Advantage

High utilization rate, 50% higher than spraying Si rotary target

Remarks

We can bond the tubes together as the photo attached