Product Details

Ultra-hard PVD coating machine

Ultra-hard

1.Feature:

1.Equiped with rectangular arc sources and anode layer ion source

2.Three-channel feedback control system:arc sources,gas path,deposition process

3.Octahedral Chamber:

a.Promotion of space utilizatin and reliablity for using

b.Designed flecibly to obtain the best deposition effect

c.Convenient mainteance and also easy to be repaired

2.Superhard Coating:

TiN,TiC,CrN,CrC,TiN,AlTiN,DLC

3.Application:

tool,cutting tool,drill,cutter,precision part and electronic product

3.Technical parameter:

VAKIA-HTC Tooling Coating Machine
Model	VAKIA-HTC-700	VAKIA-HTC-900	VAKIA-HTC-1000
Size of vacuum chamber	Ø700×H900mm	Ø900×H1100mm	Ø1000×H1200mm
Type of power	Arc power supply, filament power supply, pulse bias supply
Structure of vacuum chamber	Vertical front door structure, rear air exhaust system and double-layer water cooling chamber
Material of vacuum chamber	superior stainless steel vacuum chamber
Ultimate vacuum	6.0×10-4Pa
Pumping time (unload,clean vessel)	from air to 8.0×10-3Pa less than 15minutes
Vacuum system	Diffusion pump or molecular pump + Roots pump + Mechanical pump + rotary vane mechanical pump (the specific model can be configured according to customer requirements)
Coating types	Carbide tool coating
Arc source	6sets	6sets or 8sets	8sets or 10sets
Bias power supply	20KW/1set	30KW/1set	30KW/1set
Rotating mode of workpiece turntable	Planetary revolution and rotation, variable frequency speed regulation (controllable and adjustable)
Workpiece baking temperature	Controllable and adjustable from room temperature to 550°C (PID temperature control)
Process gas	3-path or 4-path process gas flow control and display system, selective automatic gassing system
Cooling mode	Water circulation cooling mode, cooling water tower or industrial water cooler or deep cooling system. (Provided by customers)
Control mode	Manual/automatic integration mode, touch screen operation, PLC or computer control
Total power	25KW	30KW	35KW
Alarm and protection	Alarm water shortage, overcurrent and overvoltage, short circuit and other abnormal conditions of pumps, targets and so on also execute relevant protective measures and electric interlock function
Occupy space	W2m×L3m	W2.5m×L3.5m	W3m×L4m
Other technical parameters	Water Pressure ≥0.2MPa, Water Temperature ≤25°C, Air Pressure 0.5-0.8MPa
Remarks	The specific configuration of coating equipment can be designed according to process requirements of coating products

4. Ultra-hard PVD coating machine samples: