Product Details

PVD Tools Plating machine

1. Features

(1) Anode layer ion source adopts the international advanced level and plane rectangular arc source adopts domestic leading level;

(2) Multi-channel feedback control system: the arc source control, pneumatic control, process control;

(3) Acquisition process archiving, alarm data, facilitate data collection and equipment maintenance;

(4) Unique octahedral chamber design, both to improve device utilization of space and easy to maintain and repair;

(5) Can be coated superhard coatings: TiN and TiC, ZrN, CrN, TiCN ,TiAlN, DLC, etc.

2. Field of Use

Tools, cutting tools, drill bits, mills, high-grade mold, precision parts and electronics industry.

3.Main Parameters

Model and Technical Parameters of VAKIA-HTC Series Functional (Tool) Special Vacuum Ion Coating Machine
Performance/Model	HTC-700	HTC-900	HTC-1000
Size of coating chamber	700*H900mm	900*H1100mm	1000*H1200mm
Power supply type	Arc power supply, filament power supply, pulse bias power supply
Structure of vacuum chamber	Vertical front door structure, rear air exhaust system and double-layer water cooling chamber
Material of vacuum chamber	High-quality stainless steel cavity
Limit vacuum	6.0*10^-4Pa
Pump-down time (no-load)	Pump the atmosphere to 8.0*10^-3Pa ≤15 minutes
Vacuum acquisition system	Diffusion pump or molecular pump + Roots pump + Mechanical pump + Holding pump (the specific model can be configured according to customer requirements)
Coating mode	Carbide tool coating
Arc source	6 units	6 units or 8 units	8 units or 10 units
Bias power supply	20KW/1 unit	30KW/1 unit	30KW/1 unit
Rotating mode of workpiece turntable	Planetary revolution and autorotation, variable frequency speed regulation (controllable and adjustable)
Workpiece baking temperature	Controllable and adjustable from room temperature to 550°C (PID temperature control)
Process gas	3-path or 4-path process gas flow control and display system, selective automatic gassing system
Cooling mode	Water circulation cooling mode, cooling water tower or industrial water cooler or deep cooling system. (Provided by customers)
Control mode	Manual/automatic integration mode, touch screen operation, PLC or computer control
Total power	25KW	30KW	35KW
Alarm and protection	Alarm water shortage, overcurrent and overvoltage, open circuit and other abnormal conditions of pumps, targets and so on and execute relevant protective measures and electric interlock function
Equipment area	W2m*L3m	W2.5m*L3.5m	W3m*L4m
Other technical parameters	Water Pressure ≥0.2MPa, Water Temperature ≤25°C, Air Pressure 0.5-0.8MPa
Remarks	The specific configuration of coating equipment can be designed according to process requirements of coating products

4. Coated Samples

5. Three-dimensional Images