Product Details

Equipment Introduction

Optical filter Coating Machine equip with different evaporation source, electron gun, ionization source and film thickness gauge, it used for vapor deposition on the surface of metal, oxides, compound and other high melting point materials.

Features:

1) Capable of equipping ion source or plasma gun for depositing multi-layer and precise optical coatings.

2) When equipped substrate reverses mechanism, it would greatly reduce the processing time, get higher throughput, and lower production cost per unit.

3) With its high-performance layer monitoring system and computerized system, it can fulfill precise thickness requirement for optical layer coating.

4) Process control system runs on windows system interface and easy to use.

5) Repeatable and reliable coating.

Applications:

1. Anti-reflection (AR) film, reflective film, filters film, beam-splitting film, bandpass membrane, dielectric film, high reflectivity film, color reflection film and so on.

2. Wide range of applications for such field as auto reflective glass, telescope, spectacle lens, camera lens; PTV/ Liquid crystal projector lens; dichroic filter/ mirror; IR/ UV cut filter and so on.

Coating Samples:

Main Technology Specifications( Optical filter Coating Machine) :

System/Model		OEC-900	OEC-1100			OEC-1350
Chamber Size	Diameter (mm)	900	1100			1350
	Height (mm)	1150	1250			1500
Main Performance	Ultimate Pressure	10^-4Pa
	Operation Pressure	From 1 ATM to 2.0 x10^-3pa within 15 minutes (no load)
	Substrate Temp	350°C (Max)
Pumping System	Rotary Pump	3,000 L/min	3,000 L/min		3,000 L/min
	Booster Pump	600 M³/ hour	600 M³/ hour		1,500 M³/ hour
	Diffusion Pump	20,000L/sec x 1	15,000L/sec x 2		45,000L/ sec x 1
Layer Monitoring System	Optical Monitor	LP Broad Band Monitor 380mm~1,050mm
	Crystal Monitor	Single Sensor/ Six-pcs Sensor Head
Vacuum Gauge		Pirani +Cold Cathode (1ATM ~10^-9 Torr/1ATM ~10^-7Torr)
Evaporation Source	E-Beam Gun
Rotation System	Planetary or Dome
Ion Source	Optional
Cooling water flow rate		80 L/min		100 L/min			150 L/min
Cooling Tower		Water Pressure: 4kg/cm²; Pressure Drop: 2kg/cm²
Cooling Water		Inlet: 18°C; Outlet: 25°C; Standard: 20±1°C
Polycold		Optional
Air Compressor		3HP (Air Pressure: 6 ~ 8 kg/ cm²)
Grounding Resistance		Under 5Ω
Electrical Control System		PLC+PC (Windows system)
Total Power Requirement		35KW		40KW	60KW
Meissner Trap	Cryogenic Refrigerator (-110 ~ -140°C)
Environment Requirement	Class 100,000 Clean Room; Epoxy flooring; Air-conditioning; Temp. 25±3°C; HUM50±10%
Remarks	The specific configuration of coating equipment can be designed according to process requirements of coating