Automatic vacuum PVD coating machine for Optical thin film deposition can coat multi-layers on viewing window or spectrum element that applied to optical instruments optical lens.

Automatic vacuum PVD coating machine for Optical thin film deposition can be put 3 arc-shaped pieces of sectors or single arc-shaped part.

Features

1) Capable of equipping ion source or plasma gun for depositing multi-layer and precise optical coatings;

2) When equipped substrate reverses mechanism, it would greatly reduce the processing time, get higher throughput, and lower production cost per unit;

3) With its high-performance layer monitoring system and computerized system, it can fulfill precise thickness requirement for optical layer coating;

4) Process control system runs on windows system interface and easy to use;

5) Repeatable and reliable coating.

Application

APS/ DSC / DSLR Camera Lens
PTV/ Liquid Crystal Projector Lens
Dichroic filter/ mirror
IR/ UV cut filter
DVD pick-up head and CCTV Lens
AR coating

Samples

Main technology parameter

Automatic vacuum PVD coating machine for Optical thin film deposition

Model	OEC-630	OEC-1350	OEC-1500
Chamber size	Φ630	1350	1500
	800	1500		1700
fixture	Arch-shaped 3 pieces of sector or single arch-shaped part
Pumping time	From atmosphere to 5.0x10^-3Pa<15min (unloaded)
Ultimate vacuum	≤5x10^-4Pa
Evaporation source	2 groups resistance evaporation, single power source
	E-beam, high pressure, adjustable
Ion source	Kerr source, double filament, power: 2KW
Film thickness controller	MDC-360C crystal film thickness controller or SQC-310, 9704 optical film thickness controller
Controlling system	Crystal touching screen and PLC make up the fully automatic controlling system, ( Automatic/ Manual)
Thickness Method	Crystal Monitor/ Admittance Monitor
Baking system	350, PID thermostatic control,9KW
Used for	Optical lens, glass products, ornaments, lamps, plastic products
Remark	Can be designed according to customers request