Shanghai magnetron sputtering technology coating machine  

magnetron sputtering technology

1.Feature:

Good compactness,consistency,smooth,high hardness and strong adhesion

Large area deposotion at low temperature

2.Technical Parameters:

  3.Basic Configuration:

Vertical chamber open-door,made of SUS304 stainness steel

Pumping system:mechnical+roots pump+diffusion pump or melecular

Operation at touch screen,controlled by PLC,manual and automatic

The magntron target can be offord:rectangular magntron target,cylindrical

magntron target,magntron twin targets.And also the pulse bias supply can be afford.

Alarm at unusual circumatances and taking safty measures

Real-time display various,production process automatic,save parameters

Anode layer ion source

4.Product Description:

Double-door/single door

Occupy Place:W4mxL5m

Total Power:50KW

Size of vacuum Chamber:Ø1600xH1500mm

5.Application:

hardware,metal,ceramic,plastic,glass,3c

6.Samples: