Product Details

Product Description

This MSC-Series Magnetron Sputtering coating machine consist of vacuum coating chamber, vacuum pumping system, deposition system, cooling system , electrical control system , workpiece rotating rack , and others.

Film Function:

Decorative film, functional coating.

Application field:

The substrates can be plastic, ceramics, glass etc.

Product Characteristic

1) With fast film deposition rate, bright color, and almost all the color can be done.

2) The film that is good density, high purity and uniform.

3) Cleanness, pollution-free, instead of water plating.

4) Advanced control system and easy to operate, deposited at various workpiece.

Film color

Most of the color can be coated such as golden, silver, red, purple, blue, gray, black and multi-color and makes the product look more graceful and attractive.

Main Technology Specifications:


property type	MSC-900	MSC-1000	MSC-1250	MSC-1200	MSC-1400	MSC-1600
chamber size(mm)	900x900	1000x1200	1250x1200	1200x1400	1400x1600	1600x1800
power supply type	Filament supply, pulsed bias supply, DC magnetron supply, Medium frequency magnetron supply, RF magnetron supply
chamber structure	vertical double door, rear exhausting system
chamber material	High grade SUS 304
ultimate vacuum	6.0×10^-4Pa
pumping time / no-load	From atmosphere to 8.0×10^-3Pa≤10min
vacuum system	diffusion pump/ molecular pump+ roots pump + mechanical pump + maintain pump
coating way	magnetron sputtering coating
coating type	metal films , reflection films, compound films(nitride, oxide),multi layer films, semiconductor films
target type	rectangle /cylindrical / twin magnetron target
target quantity	Equipment according to different coating process and customers' requires
workpiece rotation stand	planetary rotation, frequency control
cooling way	water circulatory cooling with cooling tower or cryogenic system
control type	manual / automatic , touch screen , PLC or computer control
alarm and maintain	alarm for lacking water or other abnormalities and automatic protect