VDF small single crystal furnace,VDF furnace

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Single crystal furnace /directional solidification furnace
Product description:
1 Equipment function
Produce silicon carbide columnar crystal,
single crystal size:THG2(2 inches in diameter), THG3(3 inches)
2 Equipment components
Vacuum chamber, vacuum system, relief system, seed crystal rod movement system, crucible rod movement system, heating system, pneumatic system, cooling system, alarm system, crucible device, control system, etc.
3 The vacuum chamber
1Cr18Ni9Ti manufacturing, water-cooling, vertical, with the required interface flange.
4 The seed crystal rod movement system
Seed crystal rod translates up and down or rotates, the platform adopts servo motor drive, with fast and slow two speed gear. Rotation speed is adjustable.
5 Crucible pole motor system
Crucible rod translates up and down or rotates, the platform adopts servo motor drive, with fast and slow two speed gear. Rotation speed is adjustable.
Rotation speed adjustable.
6 The vacuum system
Using turbo molecular pump system, the ultimate vacuum (cold) is 3 x 10-5 pa or less.
7 The relief system one set, controlled by the computer
8 The heating system
Used for heating graphite crucible, the highest temperature is 2500 C.
9 Gas circuit system
Configure multiple mass flowmeter.
10 The alarm system
Protect the equipment’safety and normal working.and alarm for over-temperature, broken accidentally, water pressure, water flow, pressure,etc abnormal situation.
11 Control system
Touch screen equipped with PLD control system, provide the whole machine control and protection, process parameter settings and record.
Device control adopts PLC control, the system shall be carried out in accordance with the procedures’ setting to work, protect and alarm.
In abnormal situation, according to the situation of automatic diagnosis, make corresponding measures.
Windows operating system can record, copy and query the process parameters.

Welcome to contact me for more details.