Product Details

Product Description

Mini CE certified RTP lab equipment electric annealing furnace

Application of electric annealing furnace

1.Rapid thermal annealing/ oxidation/ nitridation

2.Silicide/diffusion

3.Compund semiconductor annealing

4.Ion implantation annealing

5.Electrode alloying

6.Alloy melting point analysis

7.Thin film deposition

Features of electric annealing furnace

1.Fast heating:200°c/second, Fast cooling:1000°c to 400°c only need 30 second

2.Multi-function,widely used in thermal annealing/oxidation/nitridation and etc.

3.LCD touch screen

4.Slide type, can manual sliding or electric sliding

5.Can connect with vacuum pump and atmosphere furnace.

Technical parameters of electric annealing furnace

Model	CY-O1000-120IC-RTP
Display	LCD Touch screen
Chamber material	imported fiber
Heating element	halogen electrodes
Max.temperature	1000℃
Cooling rate	1000°c to 400°c, only need 30seconds
Heating rate	200°c/second
Heating zone	Single
Halogen electrode numbers	12pcs
Tube Material	high purity quartz
Maximum sample size	4 inch
Control mode	PID automatic control via SCR power control
Temperature accuracy	±1℃
Working voltage	AC 220V 50-60Hz
Main power	7.5kw
Atmosphere	vacuum, nitrogen, argon, oxygen, air
Optional equipment	flowmeter, high vacuum system, LCD control system