Plasma Cleaning Machine to Clean and Remove Nano Scale Organic Contamination on Wafer
Parameters of Plasma Cleaning Machine
| Model no. | CY-P10L-B | CY-P5L-A | CY-P2L-A | CY-P2L-B |
| Display | LCD touch screen | LED button screen | ||
| Power supply | AC 220V 50Hz | |||
| Working current | plasma cleaner working current less than 1.2A | |||
| Radio frequency power | 100-400w, adjustable | < 200w, adjustable, or customized | ||
| RF frequency | 13.56MHz(offset less than 0.4KHz) | 40KHz(offset less than 0.2KHz) | ||
| Characteristic impedance | 50 Ohm,automatch | |||
| Chamber capacity | 10L | 5L | 2L | 2L |
| Vacuum degree | 60Pa-100Pa | 10Pa-100Pa | 30Pa-100Pa | 10Pa-1000Pa |
| Cleaning time | 1~6000ml adjustable | |||
| Gas flow speed | 10~100ml | |||
| Control mode | Manual control or Programmable control | |||
| Vacuum pump | CY-4C | |||
| Vacuum chamber temper. | less than 65℃ | |||
| Cooling type | forced air cooling | |||
| Equipment list | plasma cleaner:1set; vacuum pump: 1set; vacuum high-pressure hose: 1pc;O type card: 4pcs;protective tube(0.2A,1.5A): each 3pcs. | |||
Detailed Images of Plasma Cleaning Machine
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Details of our company
Zhengzhou CY Scientific Instrument Co., Ltd. is mainly provide regular furnace for lab.Our mainly products include high temperature furnace,include 1200/1400/1700 degree muffle furnace,1200/1400/1700 degreetube furnace, dental furnace, vacuum furnace,gold melting furnace, SiC heating element, MoSi2 heating element, alumina tubes and crucibles, and etc. We also do customized furnace and some other related accessories and equpments in high quality and low cost precision machines for material research and R&D lab.
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package of Plasma Cleaning Machine
Our service
1.Reply your inquiry in 24 working hours.
2.We are a manufacturer so that we have the punctual delivery time.
3.Rich experience. We do OEM services.Our customers are all over the world like USA, UK, Russia, Korea, Southeast Asia, etc. so that we are quite experienced.
4.Exclusive and unique solution can be provided to our customer by our well-trained and professional engineers and staff.
Payment : T/T, L/C, WEST UNION, PAYPAL, CREDIT,CASH,ESCROW AND ETC.
Warranty : Main product is 12month, except wearing parts.
If you have any questions for our Plasma Cleaning Machine,please do not hesitate to contact us!
We are always at service in 24 hours!