Product Details

Three-Heads Compact 2” Magnetron Plasma Sputtering Coater/magnetron sputtering machine

magnetron sputtering machine

Introduction of magnetron sputtering machine

VTC-600-3HD is a 3-heads compact 2“ magnetron sputtering system with optional power source: DC supttering , RF supering, both RF and DC supttering, which allows researcher doing all types of thin film coating in one machine A film thickness tracker is included to enable the user to control processing easily. This coateo is suitable for coating multiple layer film of a wide range of material,such as ferroelectric, alloy, semiconductor, ceramic, dielectric, optical, oxide, hard, PTFE etc. at affordable cost.

Technical Parameters of magnetron sputtering machine

magnetron sputtering machine

Compact Structure
Input Power	220VAC 50/60Hz, single phase 2000W (including pump)
Source Power	The power source is optional with single DC power source, single RF power source or both DC and RF power source. (Please select it in the option bar) DC source: 500W for coating metallic materials ( below left) Compact 300 RF source for non-conductive materials ( Below right)
Magnetron Sputtering Head	Three 2" Magnetron Sputtering Heads with water cooling jackets are included ( click picture-left to see detailed specs ) to connect optional power source Head Water Cooling: 10ml/min water flow required
Vacuum Chamber	Vacuum Chamber: 300 mm Dia x 300 mm height, made of stainless steel Observation Window: 100 mm diameter Hinged type cover on top with air spring sport makes target exchange easy
Sample Holder	Sample holder size: 140mm dia. for. 4" wafer max Sample holder rotation speed is adjustable: 1 - 20 rpm for uniform coating The holder temperature is adjustable from RT to 500°C Max with accuracy +/- 1.0 °C
Gas Flow Control	Two precision digital MFC (mass flow controller) are installed to allow two types of gases to be filled in Flow rate: 200 ml/min max. Flow rate is adjustable on the 6" touch screen control panel
Vacuum Pump Station	1.High speed turbo vacuum pump system (made in Germany) is directly installed on the vacuum chamber for max. vacuum level 2.Heavy duty dual stage mechanical pump is connected to turbo pump for faster pump speed 3.Mobile pump station is included and the compact sputtering coater can be put on top of station 4.Max. vacuum level: 10^-6 torr with chamber baking
Thickness Monitor	1.One Precision quartz thickness sensor is built into the chamber to monitor coating thickness with accuracy 0.10 Å 2. LED Display Unit outside chamber can: Input material to be coated according to data base included Display total thickness coated and coating speed 3.5 pcs quartz sensors (consumable) are included 4.Water cooling is required
Overall Dimensions	L1300mm× W660mm× H1200mm
Net Weight	160 kg
Warranty	One years limited warranty with lifetime support