Product Details

DC Magnetron Sputtering Coater machine w Rotary Stage & Water Chiller - VTC-16-SM

Introduction of magnetron sputtering machine

magnetron sputtering machine

VTC-16-SM is a High Power Desktop Magnetron Plasma Sputtering Coater with a water cold 2" target head , water chiller and rotatable sample holder, which is designed for coating all metallic films, including Zn, Al, Ti light metallic film at affordable cost. One Aluminium target is included for immediate use.

Technical parameters of magnetron sputtering machine

Input Voltage	110/220VAC switchable
Output Power	1600VDC 250W 150mA max. Built-in over current (>150mA) protection
Specimen chamber	Quartz glass tube, 167mm OD. x 152mm ID x 260mm Height
Sputtering Head & Specimen stage	2“ magnetron sputtering head with water cooling jaket is included ( click PIC below-left to see specs ) One 50 mm Dia stainless steel .sample stage is built in, which is rotable from 0 - 5 RPM One manually operated shutter is build in to achieve better coating ( click PIC below -right to see detail ) Built in a fixture to place sputtering head when open chamber Distance between sputtering head and sample stage is adjustable from 60 - 100 mm. One Air Cold Recirculating Water Chiller 10L / min Flow is included for cooling sputtering head.
Control Panel	6" color touch-screen control panel with PLC integration for easy operation One panel controls all parameters, including vacuum, current, target position and substrate heating temperature
Ultimate Vacuum Pressure	Built in KF25 vacuum port The system requires a Ar gas tank with pressure regulator, which is not included <10E-2 mbar by vane vacuum pump (not included) for Au, Ag, Pt, Cu, Mo targets (not sensitive to air) 7.5E-5 mbar by Turbo molecular pump (not included) for Al, Mg, Li, Lr, Ti, Zn targets (sensitive to air)
Gas Atmosphere	One needle valve installed to allow Ar gas inlet to achieve better plasma coating The system requires an Ar gas tank with pressure regulator which is not included
Target	Target size: 50 mm dia. x (0.1 - 3) mm,thickness One 2" Aluminium target is included Also can coat Ag, Al, Cr, Ni, Pt, Ti, Sn, Mg, etc. These targets are available upon request. Aluminum Target Recommend Coating Method
Optional Film Thickness Monitor	Film thickness monitor is optional at extra cost ( click PIC below-left to see specsand order ) Heatable sample stage upto 500oC is available upon request at extra cost
Overall Dimensions	( L 440mm×W 330mm × H 290mm without sputtering head )
Warranty & Certificate	One year limited with lifetime support CE certified