Featrues of high temperature CVD tube furnace
1.Lower temperature processing compared to conventional CVD.
2.Film stress can be controlled by high/low frequency mixing techniques.
3.Control over stoichiometry via process conditions.
4.Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy and
Amorphous silicon (a-Si:H) deposition.
Technical parmaters of high temperature CVD tube furnace
Plit Tube furnace | Input power: 208 – 240V AC, 1.2kW |
Plasma RF Generator | Output Power:5 -300W adjustable with ± 1% stability |
Vacuum Flange and Fittings | Vacuum flange set is made of stainless steel 304. |
Vacuum Pump | AC 220V 50 Hz 1/2HP 375W |
Warranty | 12 month (exclusive wearing part) |
Pictures show of high temperature CVD tube furnace
Packaging of high temperature CVD tube furnace
Shipping and transportation
As customer request. Generally, Our mode of transport are as by sea, by air or rail transport
Payment
T/T, L/C, WEST UNION, PAYPAL, ESCROW AND ETC
Warranty
Main product is 15 month, except wearing parts.
Factory show
Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development,design, manufacturing and sales of equipment used in scientific researches,Independence and innovation is the company's tenet..It is a high-tech companies that engaged in the research and
development, design, manufacturing and sales of equipment used in scientific researches.Mainly
focus on Our main products include:microwave sintering furnace, dental porcelain furnace, tube
furnace,muffle furnace,,zirconia sintering furnace,Phosphor powder sintering furnace,crystal sintering furnace, battery material sintering furnace, CVD system, relative accessories and etc. determined to do advanced materials preparation equipment manufacturers and suppliers of leader.
other furnace we can manufacture
FAQ
Q 1.: Are you a trading company or a manufacturer?
A.We are a manufacturer in China and have been in this line for more than 10 years with full experience.
Q 2: What is the essential details for a quotation?
A.Please offer us the furnace size, the work piece size, the max. Temperature, vacuum degree and other special requirement. We can make sure which one is suitable for you. Then we can quote you quickly
Also you can contact us online or send emails to us directly
Q 3: Is it hard to operate &maintain?
A.Our furnace has the PLC controller and intelligent programmable temp. Controller, user can use touch screen to set curves, auto/manual switch interlock, auto &monitor system, it is easy to operate. We prepare enough spare parts for user and on line technical support.
Q 4:How about training?
A.Buyer sent operator to our factory to get trained about the furnace operation, Our engineers offer training in the users working site
Q 5: How long will it take to get the delivery day?
A.Normally it will take 8-20 working days. Also it depends, general model, 1-5 sets, we can delivery within 10 days. Otherwise, we should check the details depend on the quantity and design.
Q 6. How about packaging ?What should I do if machine damaged?
A.Usually machine is packed with wooden case and standard export carton,
plywood carton or as your requirement.Damage haven’t happened before.
If you want to buy high quality furnaces in China.
Just stop searching ! And contact us without hesitation
We are looking forward your order of High temperature CVD tube furnace