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Product Description

Newest high efficiency plasma melter equipment graphite tube furnace

Application of graphite tube furnace

Plasma Enhanced Chemical Vapor Deposition tube furnace system (PECVD), which consists of 500W RF plasma source, 2" or 3.14" O.D optional split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high quality mechanical pump. The PECVD furnace is an ideal and affordable tool to deposit thin films or grow nano-wire from a gas state (vapor) to a solid state.

Featrues of graphite tube furnace

1.Lower temperature processing compared to conventional CVD.
2.Film stress can be controlled by high/low frequency mixing techniques.
3.Control over stoichiometry via process conditions.
4.Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy and

Amorphous silicon (a-Si:H) deposition.

5.High vacuum system, maximum vacuum degree can reach: 6*10^-6Pa

Technical parmaters of graphite tube furnace

Plit Tube furnace	Input power: 208 – 240V AC, 1.2kW 1200°C Max. working temperature for < 60 minutes 1100°C Max for continuous heating High purity quartz tube 2"OD x 1.7"ID x 39.4" Length 30 segments programmable precision digital temperature controller 8" (200mm), single zone. 2.3" (60mm) (+/-1°C) @ 1000°C
Plasma RF Generator	Output Power:5 -300W adjustable with ± 1% stability RF frequency: 13.56 MHz ±0.005% stability Reflection Power: 200W max. Matching: Automatic RF Output Port: 50 Ω, N-type, female Noise: <50 dB. Cooling: Air cooling. Power : 208-240VAC, 50/60Hz
Vacuum Flange and Fittings	Vacuum flange set is made of stainless steel 304. Left flange assembly includes a KF-25 vacuum port, two KF-25 quick clamp, A KF-25 right angle valve, a KF-25 vacuum bellows, a flange Support 1/4 O.D Hose fitting, and a needle valve. Right flange assembly includes a digital pirani gauge, 1/4 O.D tube fitting, 1/4" Feedthrough and a needle valve.
Vacuum Pump	AC 220V 50 Hz 1/2HP 375W 2 Liter /S or 120 liter/m Oil trap (inlet) and exhaust filter (outlet) are installed. Max. vacuum: 4*10^-6Pa
Warranty	12 month (exclusive wearing part)