CVD equipment / CVD furnace / tube furnace for CVD
The 1200C series furnace workstation consists of a 1200C series tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts. The max. working temperature of this workstation is 1200°C. . It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protected.
Specification of the CVD furnace system equipment:
tube furnace | Casing | Double layer steel casing with air cooling. Built in thermostat to control Cooling running automatically when case > 55C. |
Processing Tube | Material: Fused quartz | |
Power | 2.5KW | |
Rated Voltage | AC 208-240V Single phase, 50/60Hz | |
Heating Element | Resistance wire | |
Working Temp. | Max. Heating Temp.: 1200CContinuous Working Temp.: 1100C | |
Heat-up Rate | Heat-up rate: 1~20C/min programmable | |
Heating Zone Length | Total heating zone: 440mmConstant Temp. Zone: 150mm | |
Temp. Control | PID automatic control with 30 steps programmable segments. Temperature accuracy: 1 C Thermocouple: K type | |
Vacuum Seal | One pair of stainless steel vacuum flange with: one mechanical pressure gauge two needle valves one KF-25 connector for the high vacuum station. | |
Power | 100~110W | |
Rated Voltage | AC 208-240V Single Phase, 50/60Hz | |
High Vacuum Station | Structure | Mobile cart size: 600 (L) x 600 (W) x 700(H), mmMax. Loading: 600 Lbs on topVacuum sensor is included |
Working Range | From 1000 mbar to <1E-7 mbar | |
Ultimate Pressure | <1E-8 mbar | |
Mass Flow Gas Control | Structure | 3 channel MFC Made of 316 stainless steel with gas flow range as below: Controller : 1~500SCCM Different range of gas flow is available upon request 3 Channel gas go through a Gas mixing tank: 80X120mm Dimension: 600(L) x 600(W) x 700(H), mm |
Power | 18W | |
Rated Voltage | AC 208-240V, Single phase, 50/60Hz |
Detailed photos of the CVD tube furnace system/ CVD system:
CVD tube furnace syetem with sliding RTP tube furnace
tube furnace with high vacuum system