Product Details

Hi-Vacuum Chamber Furnace/electric vacuum crucible furnace/vertical crucible furnace

Introduction of vacuum crucible furnace

VBF-1200X-H8 is a UL/CSA certificateable vacuum furnace. It equips a 7.5" ID x 13.4"L quartz tube chamber sitting horizontally. Water-cooled stainless steel vacuum flanges with valves are installed to achieve a vacuum of 10-2 to10-5 torr through a mechanical or molecular vacuum pump. It is designed for calcining or annealing semiconductor wafers (up to 6") under vacuum or various other gas atmospheres with a temperature up to 1100C. It also can also be used as vacuum brazing furnace for fusing small parts.

Technical parameters of vacuum crucible furnace:

Power	4 KW max.
Voltage	Single phase 208 - 240 VAC / 50/60Hz, (25 A breaker installed)
Working Temperature	<= 1000 °C continuously Max. 1100 °C, < 30 minutes Temperature Uniformity: +/- 2C
Heating Rate	Max. 20C/ min Recommended. 10°C/ min
Heating Elements	High quality Ni-Cr-Al resistance wire as heating elements and can be heated up to 1200C.
Quartz Tube Size & Effective Heating Area	Tube size: 8" O.D. x 7.5" I.D x 13.4" L. Heating area: 7.5" ID x 8.5" Depth (7.6Liter) Uniform Temperature zone: 4"dia x 3.5" depth in center position within +/- 5ºC Quartz tube is replaceable ( click picture left to order spare tube )
Vacuum Flange	Stainless steel vacuum flange with dual high temperature silicone O-rings at front door. One needle valve is built into the flange for use as gas inlet. One KF25D port on left side of furnace for connection to vacuum pump. A water cooling jacket has been built inside the flange to protect the vacuum sealing assembly from melting at over 300°C. The inlet and outlet ports located on the left side of furnace are used for connecting to a water chiller through two 12 mm dia. polyurethane tubes (water chiller is sold separately). Please click picture below left to order the water chiller. A Quartz Thermal Block (filled with fibrous alumina) is included to prevent heat radiation and dissipation. It also provides excellent vacuuming while ensuring a clean environment inside the chamber. Optional: If using the furnace for flat samples, a flat sample holder (pictured left-bottom)
Digital Vacuum Gauge	Mechanical vacuum gauge with range between -0.1 to 0.15 Mpa is included for vacuum pressure measurement. You may order a gas independent vacuum gauge with wide range between 3.8x10-5 to 1125 Torr at picture below KF25 Vacuum Fitting with KF25 Right-Angle Valve for quick connection to KF25 Bellows. Mechanical vacuum gauge Optional gas independent gauge
Vacuum Pressure	Vacuum Level is dependent on the vacuum pump used, connected pipe, interior refractory block's materials etc. By using KFD25, stainless steel pipe, two stage mechanical pump and KF25 Ball valve, the furnace can achieve vacuum levels below: 10 mtorr (10-2 torr)via mechanical pump within 30 minutes without Thermal Block 60 mtor(6x10-2 torr ) via mechanical pump within 30 minutes with the Quartz Thermal Block at 900C Optional: Vacuum pump and pipe are not included, please click on BOLD or picture on optional part below to order. For achieving a higher vacuum level, a Turbo-molecular Vacuum Pump Station is necessary. (click bottom left picture to see detail specs ) Spare sealing O-ring is available at extra cost ( click bottom right picture below )