High Performance Bi-Directional
Digital MEMS Gas Flow Sensor
MFC2000 Series
MFC2030/MFC2070 Digital MEMS Gas Flow Sensor DESCRIPTION
MFC2000 series is a new gas flow sensing module platform based on MEMSIC’s proprietary CMOS technology for thermal mass flow sensing. It can measure up to 70 SLM bi-directional flow rate with +/-3.0% accuracy.
The sensing element is monolithically integrated with CMOS signal processing circuitry and embedded software capable of converting gas flow rates to a digital or analog output with very high repeatability. The module has very low operating power consumption (<5 mA) and a low power consumption sleep mode (<100 µA) for optimal power management in portable applications. The MFC2000 series is externally powered, up to 5.5V (3.3V typ.). I2C digital output is standard. Other output available upon request.
MFC2030/MFC2070 Digital MEMS Gas Flow Sensor FEATURES
• Bi-directional flow
• High dynamic range
• ±3% m.v. accuracy
• ±0.6% m.v. repeatability
• Low power consumption
• Fast response time
• Single 2.7 - 5.5Vdc power supply
• Digital I2C and analog outputs
• Standard fitting sizes
• Custom fluid connector available
• Temperature compensated
• Highly configurable firmware
• Easy-to-use PC-based GUI
• RoHS and WEEE compliant
MFC2030/MFC2070 Digital MEMS Gas Flow Sensor APPLICATIONS
• Medical gas flow measurement and control
• Industrial gas flow measurement and control
• Consumer products
MFC2030/MFC2070 Digital MEMS Gas Flow Sensor CHARACTERISTICS
(Measurements performed with air at 23°C temperature, 1 Atm pressure, 50% RH, at 5.0V DC power supply, unless otherwise specified). Calibration conditions for standard liters per minute slm: 20°C, 1013mbar.
| Parameter | Condition | 30 SLM | 70 SLM | Unit | |
| Measurement Range | Direct port | +/- 30 | +/- 70 | SLM | |
| Flow Direction | Bi-directional | N/A | |||
| Supply DC Voltage (VDD) | 2.7 - 5.5 | Vdc | |||
| Interface Voltage (VDDIO) | (See note 1) | 2.7 - 3.0 | V | ||
| Output Range | I2C Mode | 0 - 65,535 | LSB | ||
| Analog Mode | 0 - VDDIO | Vdc | |||
| Operating Temperature | (20) - 80 | °C | |||
| Calibrated Temperature | 0 - 50 | °C | |||
| Storage Temperature | (40) - 85 | °C | |||
| Relative Humidity | non-condensing | 0 - 95 | % | ||
| Supply Current | Continuous, Fs = 100Hz | 5 | mA | ||
| Sleep mode | 100 | µA | |||
| Accuracy | 1% Qmax ≤ Q <100% Qmax | 3.0 | % m.v. | ||
| Q <1% Qmax | 0.03 | % FS | |||
| Repeatability | ODR =100Hz | 0.1Qmax ≤ Q ≤ Qmax | 0.6 | % m.v. | |
| Q <0.1Qmax | 0.06 | % FS | |||
| ODR =10Hz | 0.1Qmax ≤ Q ≤ Qmax | 0.2 | % m.v. | ||
| Q <0.1Qmax | 0.02 | % FS | |||
| ODR =1Hz | 0.1Qmax ≤ Q ≤ Qmax | 0.05 | % m.v. | ||
| Q <0.1Qmax | 0.005 | % FS | |||
| Offset Shift w/Temp. | 0 - 50°C | 2 | SCCM/°C | ||
| Span Shift | 0 - 50°C | 0.1 | % m.v./°C | ||
| Pressure Drop | Q max | 4 | 18 | mbar | |
| Sample Rate/Response Time | 10 | ms | |||
| Orientation Sensitivity | TBD | % m.v | |||
| Wake Time | Wake up from sleep mode | 40 | ms | ||
| Working Pressure | 0 - 8 | Bar | |||
| Module Weight | Includes aluminum inserts | <100 | g | ||
| Wetted Material | Si, SiO 2 , Si 3 N 4 , Aluminum, PPSU, Stainless steel, Viton, Nitrile rubber, Aluminum alloy 3003, Epoxy, Silicone | ||||
MFC2030/MFC2070 Digital MEMS Gas Flow Sensor ABSOLUTE MAXIMUM RATINGS
| Supply Voltage (VDD) | 2.7 to +5.5V |
| Storage Temperature | -40°C to +85°C |
| Pressure | 0 - 8 Bar Gauge |
| Shock | 10g, 0.5ms |
| Vibration | 1g, 5 to 200 Hz |
| ESD | 4kV/8kV (contact/air discharge) |
MFC2030/MFC2070 Digital MEMS Gas Flow Sensor ORDERING INFORMATION