The DHP series ultra pure low-pressure pneumatic diaphragm valve is suitable for conveying high-purity gases under low-pressure conditions in the semiconductor industry. The product adopts a compact design while achieving high CV values. Produced in a high standard clean room, EP electrolytic polishing is used to treat the inner surface, with a roughness of Ra ≤ 5 μ In. Each product needs to undergo helium mass spectrometry leak testing to ensure application safety.
