The DLM series ultra pure low-pressure manual diaphragm valve is suitable for conveying high-purity gases under low-pressure conditions in the semiconductor industry. The product adopts a compact design while achieving high CV values. Produced in a high standard clean room, EP electrolytic polishing is used to treat the inner surface, with a roughness of up to

Ra ≤ 5 μ In. Each product needs to undergo helium mass spectrometry leak testing to ensure application safety.

material

Valve body: SS316L, SS316L VAR, SS316L VIM/VAR

Valve seat: PCTFE/PFA/PI

Diaphragm: Cobalt based Superalloy, Hastelloy C-22, SS316L

Operating temperature

PCTFE: -10~80 ° C PFA/PI: -10~150 ° C

Maximum operating pressure: 300psi (20.7Bar)

Internal leakage rate of valve body: ≤ 1.0x10-9Pa ·m3/sec He External leakage rate of valve body: ≤ 1.0x10-9Pa ·m3/se

Product specifications