model

VR-3200

type

Working head

Applicable controller

VR-3000K

Observation and measurement range

Large field of view mode

12x magnification on a 15-inch monitor

Horizontal (h)

24mm

Vertical (v)

18mm

25x magnification on a 15-inch monitor

Horizontal (h)

12mm

Vertical (v)

9mm

38x magnification on a 15-inch monitor

Horizontal (h)

8mm

Vertical (v)

6mm

50x magnification on a 15 "monitor.

Horizontal (h)

Vertical (v)

4.5mm

High magnification mode

Magnification 40x on a 15-inch monitor

Horizontal (h)

7.6mm

Vertical (v)

5.7mm

80x magnification on a 15-inch monitor

Horizontal (h)

3.8mm

Vertical (v)

2.9mm

120x magnification on a 15-inch monitor.

Horizontal (h)

2.5mm

Vertical (v)

1.9mm

160x magnification on a 15-inch monitor.

Horizontal (h)

Vertical (v)

1.4mm

zoom

1 to 4 times

Measurable height

Wide field of view mode: 10mm(±5mm) High magnification mode: 1mm (0.5mm) * 1.

display resolution

0.1 µm*2

Repetition accuracy (б)

measurement of elevation

0.5µm*3

Width measurement

Wide field of view mode: 1 µm, high magnification mode: 0.5 m * 3.

measurement accuracy

measurement of elevation

±3 µm*3

Width measurement

Wide field of view mode: ±5 µm, high magnification mode: 2 m * 3.

connect function

Fully automatic (XY automatic control+autofocus) measurement *4

Automatic adjustment, automatic template parsing *4

objective table

XY stroke

184 × 88 mm (electric)

Z stroke

90 mm (electric)

Rotating structure

180 (sample rotating stage)

Inclined structure

More than 30

Operating distance

75 mm

Image receiving element

1 inch 4 megapixel monochrome C-MOS

Projection lens

Double telecentric lens x2

Light receiving lens

Double telecentric lens

illuminating system

Light source for observation

LED ring lighting (red, green and blue)

Light source for measurement

White LED

Image size

1024 x 768 pix, 2048 x 1536 pix

Data processing department

Special PC for KENS (OS is Windows7)*5

rated

Power supply voltage

100 to 240 VAC ±10%, 50/60 Hz

Power consumption

150 VA

Environmental tolerance

ambient temperature

+15 to+30 c

relative humidity

35 to 80% RH (no condensation)

weight

28.0 kg