X/Y/Z range

Large field of view：

400×300×200

Small field of view：

300×300×200

Large field of view：

500×400×200

Small field of view：

400×400×200

Large field of view：

600×500×200

Small field of view：

500×500×200

Overall dimensions

700×1130×1662mm

860×1222×1662mm

1026×1543×1680mm

Bearing capacity of glass countertop

30Kg

40Kg

40Kg

CCD

Large field of view, 20M pixel digital camera；Small field of view, 16M pixel digital camera

Lens

Large field of view: 0.16X double telecentric lens

Small field of view: 0.7-4.5X automatic zoom lens

Software

HD- CNC 3D

Power supply

220V+10%,50/60Hz

Optical scale resolution

Open linear scale 0.0005mm

X/Y Measurement accuracy

Large field of view:(5+L/200) um

Small field of view: (2.8+L/200)um

Repeatability accuracy

2um

Using the environment

Temperature: 20-25℃

Humidity: 50%-60%

PC

Philips 24”monitor, i5+8G+512G