Spectral Interference Displacement Sensor

The spectral Interference displacement sensor can realize precise measurement of distance, thickness of transparent objects and three-dimensional object morphology features. The instrument has high measurement accuracy, small size, simple operation and convenient to carry. It is widely used in semiconductors, photovoltaics, electronic components, automobiles, glass panels, logistics, food and other fields.

The spectral confocal displacement sensor is mainly composed of measuring head, controller and optical fiber. A specific color-coded lens is used to generate axial dispersion of the white light, and the reflected signal of the measured workpiece is analyzed by the spectrometer to analyze the confocal light wave signal. Finally, the measured displacement of the workpiece is calculated by the wavelength and displacement conversion curve.

Features

1. High stability;

2. Applicable to measurement of various morphology features;

3. The equipment is lightweight and compact , easy to carry and integrate into automated measurement system ;

4. Simple operation and high measurement accuracy;

Technical parameters

1) Measuring range: ±3mm (displacement) , 0.5-2mm (glass thickness)

2) Working distance: 55mm

3) Spot size: 10μm

4) Linearity: ±1μm

5) Resolution: 0.05μm

6) Maximum inclination angle: ±10°

7) Probe size: Φ33*75mm;

8) Probe weight: 150g